Mass spectrometer
View Patent ↗A mass spectrometer with an ionization chamber with a feed channel for a gas to be examined, including an electron source (d, n) for ionizing the gas to be examined, electrodes (c) for accelerating the ionizing electrons, electrodes (g, h, j, m) for the mass-dependent separation of the ions by acceleration/deceleration thereof, a detector (l) for the separated ions, a wiring with metallic conductors. The components are arranged on a plane nonconductive substrate ( 1 ), having an energy filter (k) for the ions, the energy filter being embodied as a 90° sector, is constructed in completely planar fashion. The ionization chamber (b), the electrodes (g, h, j, m) for accelerating the electrons and ions, the detector (l) for the ions and the energy filter (k) are produced by a single step of photolithography and etching of a doped semiconductor die ( 6 ) applied to the substrate ( 1 ) and the wiring ( 2 ) and the abovementioned parts are covered by a second flat nonconductive substrate ( 7 ).
1. A mass spectrometer comprising:
an ionization chamber (b) with a feed channel (a) for a gas to be examined,
an electron source (d, n) for ionizing the gas to be examined,
first electrodes (c) for accelerating the ionizing electrons,
a plurality of second electrodes (g, h, j, m) for mass-dependent separation of ions by acceleration/deceleration thereof,
a detector (l) for detecting the separated ions, and
a wiring with metallic conductors,
wherein the ionization chamber (b), the electron source (d,n), the first electrodes (c), the plurality of second electrodes (g,h,j,m), the detector (l) and the wiring are arranged on a plane nonconductive substrate ( 1 ), the mass spectrometer has an energy filter (k) for the ions, said energy filter being embodied as a 90° sector,
wherein the mass spectrometer is constructed in completely planar fashion,
wherein the ionization chamber (b), the plurality of second electrodes (g, h, j, m) for accelerating the electrons and ions, the detector (l) for the ions and the energy filter (k) are produced by a single step of photolithography and etching of a doped semiconductor die ( 6 ) applied to a substrate ( 1 ) and wiring ( 2 ) and wherein the ionization chamber (b), the plurality of second electrodes (g, h, j, m), the detector (l) for the ions and the energy filter (k) are covered by a second flat nonconductive substrate ( 7 ).
2. The mass spectrometer as claimed in claim 1 , wherein the electron source (n) is a thermal emitter.
3. The mass spectrometer as claimed in claim 1 , wherein the electron source has a plasma chamber (d) with a feed channel (e) for a noble gas and with a microwave line (f) for introducing microwaves for generating and maintaining the plasma, wherein the plasma chamber (d), the feed channel (e) and the microwave line (f) are produced by etching of the semiconductor die ( 6 ).
4. The mass spectrometer as claimed in claim 1 , wherein the plurality of second electrodes (g, h, j) for the mass-dependent separation of ions by acceleration/deceleration are embodied and arranged as a time-of-flight mass separator.
5. The mass spectrometer as claimed in claim 1 , wherein the electrodes (g, m) for the mass-dependent separation of irons by acceleration/deceleration are embodied and arranged as travelling-wave separator.
6. The mass spectrometer as claimed in claim 1 , wherein the detector (l) for the ions is embodied as a Faraday detector.
7. The mass spectrometer as claimed in claim 1 , wherein the detector (l) for the ions is embodied as an electron multiplier.
8. The mass spectrometer as claimed in claim 1 , wherein the first electrodes (c) for accelerating the electrons are two electrodes which are provided with screen openings and to which different electrical potentials can be applied.
9. The mass spectrometer as claimed in any of claim 1 , wherein the mass spectrometer has a microcontroller.
10. The mass spectrometer as claimed in claim 1 , wherein the metallic conductors ( 2 ) and the electrodes ( 4 ) are electrically connected by eutectic metal-semiconductor contacts.
11. The mass spectrometer as claimed in claim 1 , wherein the metallic conductors ( 2 ) and the electrodes ( 4 ) are electrically connected by eutectic gold-semiconductor contacts.
12. The mass spectrometer as claimed in claim 1 , wherein the semiconductor material is doped silicon.
13. The mass spectrometer as claimed in claim 1 , wherein the nonconductive substrates ( 1 , 7 ) are composed of borosilicate glass or quartz glass.
14. A method for producing a mass spectrometer, comprising the steps of
providing an ionization chamber for a gas to be examined with a feed channel for the gas,
providing an electron source for electrons that ionize the gas,
providing first electrodes for accelerating the electrons,
providing a plurality of second electrodes for focusing and accelerating ions emerging from the ionization chamber and for the mass-dependent separation of said ions by acceleration/deceleration,
providing a detector for the ions,
connecting with metallic wiring conductors the ionization chamber, the electron source, the first electrodes, the plurality of second electrodes,
providing an energy filter for the ions, said energy filter being embodied as a sector,
wherein the metallic wiring conductors are applied to a flat nonconductive substrate, and
wherein metal pads for connection to the semiconductor electrodes are being arranged on said wiring,
etching depressions corresponding to the wiring into the semiconductor die,
applying the semiconductor die to the substrate,
aligning a mask for photolithography optically using light having a wavelength of above approximately 1.2 μm on the semiconductor die,
subsequently etching locally, and
covering the semiconductor die with a flat second nonconductive substrate.
15. The method as claimed in claim 14 , wherein wiring is applied with the second nonconductive substrate.
16. The method as claimed in claim 14 , wherein doped silicon is used as semiconductor material.
17. The method as claimed in claim 14 , wherein gold is used as the metal for the metal pads.