Switch structures
View Patent ↗A device, such as a switch structure, is provided, the device including a contact and a conductive element. The conductive element can be configured to be selectively moveable between a non-contacting position, in which the conductive element is separated from the contact (in some cases by a distance less than or equal to about 4 μm, and in others by less than or equal to about 1 μm), and a contacting position, in which the conductive element contacts and establishes electrical communication with the contact. When the conductive element is disposed in the non-contacting position, the contact and the conductive element can be configured to support an electric field therebetween with a magnitude of greater than 320 V μm −1 and/or a potential difference of about 330 V or more.
1. A device comprising:
a contact; and
a conductive element configured to be selectively moveable between a non-contacting position in which said conductive element is separated from said contact and a contacting position in which said conductive element contacts and establishes electrical communication with said contact,
wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to support an electric field therebetween with a magnitude of greater than 320 V μm −1 .
2. The device of claim 1 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be held at a potential difference of at least about 330 V.
3. The device of claim 1 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be separated by a distance that is less than or about equal to 4 μm.
4. The device of claim 1 , wherein said conductive element has a surface area-to-volume ratio that is greater than or equal to 10 3 m −1 .
5. The device of claim 1 , wherein said conductive element is separated from said contact by a distance that is less than or equal to about 1 μm when in the non-contacting position.
6. The device of claim 1 , wherein said conductive element is configured to undergo deformation when moving between the contacting and non-contacting positions.
7. The device of claim 1 , wherein said conductive element includes a cantilever.
8. The device of claim 1 , wherein said contact and said conductive element are part of a microelectromechanical device.
9. The device of claim 1 , further comprising a power source in electrical communication with at least one of said contact or said conductive element and configured to supply a voltage of at least about 330 V.
10. The device of claim 1 , wherein said conductive element is configured to undergo deformation when moving between the contacting and non-contacting positions, and wherein at least one of said contact or said conductive element has an effective contact surface area configured such that an electrostatic force between said contact and said conductive element when said conductive element is in the non-contacting position is less than a force required to bring said conductive element and said contact into contact.
11. The device of claim 1 , wherein said contact and said conductive element are configured to limit current therebetween to about 1 μA or less when said conductive element is disposed in the non-contacting position.
12. The device of claim 1 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be held at a potential difference that oscillates with an amplitude of at least about 330 V and with a frequency of less than or equal to about 40 GHz.
13. The device of claim 1 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be held at a potential difference of at least about 330 V for a time of at least about 1 μs.
14. The device of claim 1 , further comprising a substrate, and wherein said contact and said conductive element are disposed on said substrate.
15. The device of claim 1 , wherein at least one of said contact or said conductive element has an effective contact surface area that is less than or equal to about 100 μm 2 .
16. The device of claim 15 , further comprising a power source in electrical communication with at least one of said contact or said conductive element and configured to supply a current of at least about 1 mA when said conductive element is disposed in the contacting position.
17. A device comprising:
a contact;
a conductive element configured to be selectively moveable between a non-contacting position in which said conductive element is separated from said contact and a contacting position in which said conductive element contacts and establishes electrical communication with said contact; and
a power source in electrical communication with and configured to supply a voltage to at least one of said contact or said conductive element,
wherein, when said conductive element is disposed in the non-contacting position, said power source is configured to supply a voltage sufficient to establish an electric field between said contact and said conductive element with a magnitude of greater than 320 V μm −1 .
18. The device of claim 17 , wherein said power source is configured to supply a voltage of at least about 330 V.
19. The device of claim 17 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be separated by a distance that is less than or about equal to 4 μm.
20. The device of claim 17 , wherein said conductive element has a surface area-to-volume ratio that is greater than or equal to 10 3 m −1 .
21. The device of claim 17 , wherein said conductive element is separated from said contact by a distance that is less than or equal to about 1 μm when in the non-contacting position.
22. The device of claim 17 , wherein said conductive element is configured to undergo deformation when moving between the contacting and non-contacting positions.
23. The device of claim 17 , wherein said conductive element includes a cantilever.
24. The device of claim 17 , wherein said contact and said conductive element are part of a microelectromechanical device.
25. The device of claim 17 , wherein said conductive element is configured to undergo deformation when moving between the contacting and non-contacting positions, and wherein at least one of said contact or said conductive element has an effective contact surface area configured such that an electrostatic force between said contact and said conductive element when said conductive element is in the non-contacting position is less than a force required to bring said conductive element and said contact into contact.
26. The device of claim 17 , wherein said contact and said conductive element are configured to limit current therebetween to about 1 μA or less when said conductive element is disposed in the non-contacting position.
27. The device of claim 17 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be held at a potential difference that oscillates with an amplitude of at least about 330 V and with a frequency of less than or equal to about 40 GHz.
28. The device of claim 17 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be held at a potential difference of at least about 330 V for a time of at least about 1 μs.
29. The device of claim 17 , further comprising a substrate, and wherein said contact and said conductive element are disposed on said substrate.
30. The device of claim 17 , wherein at least one of said contact or said conductive element has an effective contact surface area that is less than or equal to about 100 μm 2 .
31. The device of claim 30 , further comprising a current source in electrical communication with at least one of said contact or said conductive element and configured to supply a current of at least about 1 mA when said conductive element is disposed in the contacting position.
32. A device comprising:
a contact; and
a conductive element configured to be selectively moveable between a non-contacting position in which said conductive element is separated from said contact and a contacting position in which said conductive element contacts and establishes electrical communication with said contact,
wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be held at a potential difference of at least about 330 V.
33. The device of claim 32 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be separated by a distance that is less than or about equal to 4 μm.
34. The device of claim 32 , wherein said conductive element has a surface area-to-volume ratio that is greater than or equal to 10 3 m −1 .
35. The device of claim 32 , wherein said conductive element is separated from said contact by a distance that is less than or equal to about 1 μm when in the non-contacting position.
36. The device of claim 32 , wherein said conductive element is configured to undergo deformation when moving between the contacting and non-contacting positions.
37. The device of claim 32 , wherein said conductive element includes a cantilever.
38. The device of claim 32 , wherein said contact and said conductive element are part of a microelectromechanical device.
39. The device of claim 32 , further comprising a power source in electrical communication with at least one of said contact or said conductive element and configured to supply a voltage of at least about 330 V.
40. The device of claim 32 , wherein said conductive element is configured to undergo deformation when moving between the contacting and non-contacting positions, and wherein at least one of said contact or said conductive element has an effective contact surface area configured such that an electrostatic force between said contact and said conductive element when said conductive element is in the non-contacting position is less than a force required to bring said conductive element and said contact into contact.
41. The device of claim 32 , wherein said contact and said conductive element are configured to limit current therebetween to about 1 μA or less when said conductive element is disposed in the non-contacting position.
42. The device of claim 32 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be held at a potential difference that oscillates with an amplitude of at least about 330 V and with a frequency of less than or equal to about 40 GHz.
43. The device of claim 32 , wherein, when said conductive element is disposed in the non-contacting position, said contact and said conductive element are configured to be held at a potential difference of at least about 330 V for a time of at least about 1 μs.
44. The device of claim 32 , further comprising a substrate, and wherein said contact and said conductive element are disposed on said substrate.
45. The device of claim 32 , wherein at least one of said contact or said conductive element has an effective contact surface area that is less than or equal to about 100 μm 2 .
46. The device of claim 45 , further comprising a power source in electrical communication with at least one of said contact or said conductive element and configured to supply a current of at least about 1 mA when said conductive element is disposed in the contacting position.