Process to form highly conductive feature from silver nanoparticles with reduced processing temperature
View Patent ↗Exemplary embodiments provide materials and methods for forming highly-conductive features including stabilized silver-containing nanoparticles at low processing temperatures of no more than about 140° C.
1. A method for forming a conductive feature comprising:
depositing a liquid composition comprising a plurality of organoamine-stabilized silver-containing nanoparticles into a composition feature on a substrate;
heating the composition feature to a temperature of less than 140° C. to form a conductive feature; and
applying a liquid acidic composition agent to the composition feature to allow for the temperature of less than 140° C. for the heating step, wherein the composition agent is applied during the heating step and after all deposition of the liquid composition for forming the conductive feature has been completed.
2. The method of claim 1 , wherein the heating is performed at the temperature of about 120° C. or lower.
3. The method of claim 1 , wherein the organoamine is selected from the group consisting of butylamine, pentylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, hexadecylamine, undecylamine, dodecylamine, tridecylamine, tetradecylamine, diaminopentane, diaminohexane, diaminoheptane, diaminooctane, diaminononane, diaminodecane, diaminooctane, dipropylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, hexyldecane amine, methylpropylamine, ethylpropylamine, propylbutylamine, ethylbutylamine, ethylpentylamine, propylpentylamine, butylpentylamine, tributylamine, trihexylamine, and mixtures thereof.
4. The method of claim 1 , wherein the composition agent comprises an acidic composition selected from the group consisting of carboxylic acid, HCl, HNO 3 , H 2 SO 4 , and HPO 3 .
5. The method of claim 1 , wherein the plurality of silver-containing nanoparticles comprises elemental silver or a silver composite.
6. The method of claim 1 , wherein the plurality of stabilized silver-containing nanoparticles is present in an amount from about 10% to about 90% by weight of the total liquid composition.
7. The method of claim 1 , wherein the substrate comprises glass, polyimide, poly(ethylene naphthalate) (PEN), or polyethylene terephthalate (PET).
8. The method of claim 1 , further comprising applying the composition agent to the composition feature by printing or coating.
9. A method for forming a conductive feature comprising:
depositing a liquid composition comprising a plurality of organoamine-stabilized silver-containing nanoparticles into a composition feature on a substrate;
heating the composition feature at a temperature of less than 140° C.; and applying a liquid acidic composition agent to the composition feature to form a conductive feature; wherein the acidic composition agent is applied at a step selected from the group consisting of the depositing step, a step after the depositing step but prior to the heating step, and the heating step, wherein if the acidic composition agent is applied during the deposition step, the acidic composition agent is applied from a composition that is separate from the liquid composition, and further wherein if the acidic composition agent is applied either during the heating step or after the deposition step but prior to heating, then the acidic composition agent is applied after all deposition of the liquid composition for forming the conductive feature has been completed.
10. The method of claim 9 , wherein the organoamine is selected from the group consisting of butylamine, pentylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, hexadecylamine, undecylamine, dodecylamine, tridecylamine, tetradecylamine, diaminopentane, diaminohexane, diaminoheptane, diaminooctane, diaminononane, diaminodecane, diaminooctane, dipropylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, hexyldecane amine, methylpropylamine, ethylpropylamine, propylbutylamine, ethylbutylamine, ethylpentylamine, propylpentylamine, butylpentylamine, tributylamine, trihexylamine, and mixtures thereof.
11. The method of claim 9 , wherein the organoamine is present in an amount from about 5% to about 60% by weight of the total organoamine-stabilized silver-containing nanoparticles.
12. The method of claim 9 , wherein applying the acidic composition agent to the composition feature forms a network, a complex, or a salt with the organoamine of the plurality of organoamine-stabilized silver-containing nanoparticles.
13. The method of claim 9 , wherein the acidic composition agent comprises an acid having a pKa from about 0.5 to about 5.
14. The method of claim 9 , wherein the acidic composition agent is applied at a step selected from the group consisting of a step after the depositing step but prior to the heating step and the heating step.
15. The method of claim 9 , wherein the substrate is flexible.
16. A method for forming a conductive feature comprising:
depositing a liquid composition comprising a plurality of organoamine-stabilized silver-containing nanoparticles into one or more composition features on a substrate, the substrate comprising PET (polyethylene terephthalate);
annealing the one or more composition features at a temperature of about 120° C. or lower; and
applying a liquid acidic composition agent to the one or more composition features to form one or more conductive features, wherein the acidic composition agent is applied at a step selected from the group consisting of the depositing step, a step after the depositing step but prior to the heating step, and the heating step, wherein if the acidic composition agent is applied during the deposition step, the acidic composition agent is applied from a composition that is separate from the liquid composition, and further wherein if the acidic composition agent is applied either during the heating step or after the deposition step but prior to heating, then the acidic composition agent is applied after all deposition of the liquid composition for forming the conductive feature has been completed.
17. A method for forming a conductive feature comprising:
depositing a liquid composition comprising a plurality of acid-stabilized silver-containing nanoparticles into a composition feature on a substrate;
heating the composition feature to a temperature of less than 140° C. to form a conductive feature; and
applying a base composition agent to the composition feature, the base reacting with the acid stabilizer to allow for the temperature of less than 140° C. for the heating step, wherein the composition agent is applied at a step selected from the depositing step, a step after the depositing step but prior to the heating step, and the heating step, wherein if the base composition agent is applied during the deposition step, the base composition agent is applied from a composition that is separate from the liquid composition, and further wherein if the base composition agent is applied either during the heating step or after the deposition step but prior to heating, then the base composition agent is applied after all deposition of the liquid composition for forming the conductive feature has been completed.
18. The method of claim 17 , wherein the composition agent comprises NaOH, or NH 4 OH.
19. The method of claim 17 , wherein the base composition agent is applied at a step selected from the group consisting of a step after the depositing step but prior to the heating step and the heating step.
20. The method of claim 17 , wherein the base composition agent is applied during the heating step.