Layer transfer process and functionally enhanced integrated circuits produced thereby
View Patent ↗A structure for a semiconductor components is provided having a device layer sandwiched on both sides by other active, passive, and interconnecting components. A wafer-level layer transfer process is used to create this planar (2D) IC structure with added functional enhancements.
1. A method of forming an integrated device structure comprising:
a) building a semiconductor device layer on a first substrate;
b) providing a set of first functional elements to connect at least some of the devices in said semiconductor device layer;
c) attaching a carrier substrate on top of said first functional elements;
d) removing said first substrate to expose the bottom side of the said semicondcutor device layer;
e) building a set of second functional elements on said exposed bottom side of said semiconductor device layer including electrical connections to at least some of the devices in said semiconductor device layer;
f) attaching a foundation substrate to the exposed surface of said second functional elements;
g) removing said carrier substrate from the top of said first functional elements; and
h) providing input output connections on the exposed top surface of said first functional elements.
2. A method according to claim 1 wherein said first substrate is selected from the group consisting of silicon, silicon insulator, glass and quartz.
3. A method according to claim 1 wherein said first semiconductor device layer comprises devices made of a material selected from the group consisting of silicon, III-V compounds and II-VI compounds.
4. A method according to claim 1 wherein said first functional elements are selected from the group consisting of interconnect wiring, optical interconnects, microfluidic interconnects and a combination thereof.
5. A method according to claim 1 wherein said carrier substrate is made of a material selected from the group consisting of silicon, glass, quartz and ceramic.
6. A method according to claim 1 wherein said second set of functional elements are selected form the group consisting of interconnect wiring, power distribution wiring, ground planes, clock network wiring and optical interconnects.
7. A method according to claim 1 wherein said second set of functional elements further include means to provide heat dissipation and cooling to said semiconductor device layer.
8. A method according to claim 1 further comprising intermediate layers between said first and said second elements and said semiconductor device layer to provide attributes selected from the group consisting of durable adhesion and bonding, diffusion barrier function, passivation and combinations thereof.
9. A method according to claim 8 wherein said intermediate layers are selected from the group consisting of polyamic acid (PAA)-based polyimides, polyamic ester-based polyimides, pre-imidized polyimides, spin on glasses, silicon oxide, silicon nitride, silicon carbide, silicon carbonitride and combinations thereof.
10. A method of forming an integrated device structure comprising:
a) building a semiconductor device layer on a first substrate;
b) providing a set of first functional elements to connect at least some of the devices in said semiconductor device layer;
c) attaching a carrier substrate on top of said first functional elements;
d) removing said first substrate to expose the bottom side of the said semicondcutor device layer;
e) building a set of second functional elements on said exposed bottom side of said semiconductor device layer including electrical connections to at least some of the devices in said semiconductor device layer;
f) attaching a foundation substrate to the exposed surface of said second functional elements;
g) partially thinning said carrier substrate;
h) building through vias and integrated elements in said thinned carrier substrate; and
i) providing input output means such as solder connections and microjoint connections on said thinned carrier substrate.
11. A method according to claim 10 wherein said first functional elements are selected from the group consisting of interconnect wiring, optical interconnects, microfluidic interconnects and a combination thereof.
12. A method according to claim 10 wherein said second set of functional elements further include means to provide heat dissipation and cooling to said semiconductor device layer.
13. A method according to claim 10 further comprising intermediate layers between said first and said second elements and said semiconductor device layer to provide attributes selected from the group consisting of durable adhesion and bonding, diffusion barrier function, passivation and combinations thereof.
14. A method according to claim 13 wherein said intermediate layers are selected from the group consisting of polyamic acid (PAA)-based polyimides, polyamic ester-based polyimides, pre-imidized polyimides, spin on glasses, silicon oxide, silicon nitride, silicon carbide, silicon carbonitride and combinations thereof.