Vertical nitride semiconductor light emitting diode and method of manufacturing the same
View Patent ↗A vertical nitride-based semiconductor LED comprises a structure support layer; a p-electrode formed on the structure support layer; a p-type nitride semiconductor layer formed on the p-electrode; an active layer formed on the p-type nitride semiconductor layer; an n-type nitride semiconductor layer formed on the active layer; an n-electrode formed on a portion of the n-type nitride semiconductor layer; and a buffer layer formed on a region of the n-type nitride semiconductor layer on which the n-electrode is not formed, the buffer layer having irregularities formed thereon. The surface of the n-type nitride semiconductor layer coming in contact with the n-electrode is flat.
1. A method of manufacturing a vertical nitride-based semiconductor LED comprising:
sequentially forming a buffer layer, an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer on a substrate;
forming a p-electrode on the p-type nitride semiconductor layer;
forming a structure support layer on the p-electrode;
removing the substrate through an LLO (Laser Lift-Off) process;
selectively etching a portion of the buffer layer, on which the substrate is removed, so as to flatly expose a portion of the n-type nitride semiconductor layer;
forming irregularities on the surface of the buffer layer which is not etched; and
forming an n-electrode on the flatly-exposed n-type nitride semiconductor layer.
2. The method according to claim 1 ,
wherein in the etching of the buffer layer, a dry-etching process is used.
3. A method of manufacturing a vertical nitride-based semiconductor LED comprising:
sequentially forming a buffer layer, an n-type nitride semiconductor layer, an active layer, and a p-type nitride semiconductor layer on a substrate;
forming a p-electrode on the p-type nitride semiconductor layer;
forming a structure support layer on the p-electrode;
removing the substrate through an LLO process;
forming irregularities on the entire surface of the buffer layer where the substrate is removed;
selectively etching a portion of the buffer layer, on which the irregularities are formed, so as to flatly expose a portion of the n-type nitride semiconductor layer; and
forming an n-electrode on the flatly-exposed n-type nitride semiconductor layer.
4. The method according to claim 3 ,
wherein in the etching of the buffer layer, a dry-etching process is used.