Method for forming a concavo-convex pattern and a method of manufacturing a patterned medium type magnetic recording medium
View Patent ↗The invention provides a method of forming a concavo-convex pattern by partly removing a magnetic layer and a carbon protective layer in an intermediate product of a magnetic recording medium having at least the magnetic layer and the protective layer formed on a substrate surface, wherein the magnetic layer is partly removed to form the concavo-convex pattern by a dry etching method using a etching gas of a mixture gas of argon and a deposition gas containing one or more types of carbon compounds. Also disclosed is a method of manufacturing a patterned medium type magnetic recording medium employing the method of forming a concavo-convex pattern. As a result a concavo-convex pattern free of after-corrosion and exhibiting good productivity is provided.
1. A method of forming a concavo-convex pattern by partly removing a magnetic layer and a carbon protective layer in an intermediate product having at least the magnetic layer and the carbon protective layer formed on a substrate surface, wherein the magnetic layer is partly removed to form the concavo-convex pattern by a dry etching method using an etching gas of a mixture gas of argon and a deposition gas of a hydrocarbon compound;
wherein the dry etching is concurrently performed on a principal surface of the magnetic layer and a principal surface of the carbon protective layer, and
wherein the principal surface of the magnetic layer and the principal surface of the carbon protective layer are parallel to the substrate surface.
2. The method of forming a concavo-convex pattern according to claim 1 , wherein the carbon hydrocarbon compound is methane.
3. A method of manufacturing a patterned medium comprising the steps of:
preparing an intermediate product of a medium having at least a magnetic layer and a diamond like carbon protective layer formed on a substrate surface; and
forming a concavo-convex pattern by partially removing the diamond like carbon protective layer and the magnetic layer of the intermediate product of the medium using a mask having a predetermined pattern, the step of forming a concavo-convex pattern consisting of a sub-step of partially removing the diamond like carbon protective layer and a sub-step of partially removing the magnetic layer, wherein the sub-step of partially removing the magnetic layer is performed by a dry etching method using an etching gas of a mixture gas of argon and a deposition gas containing one or more types of carbon compounds;
wherein the dry etching is concurrently performed on a principal surface of the magnetic layer and a principal surface of the diamond like carbon protective layer, and
wherein the principal surface of the magnetic layer and the principal surface of the diamond like carbon protective layer are parallel to the substrate surface.
4. The method of manufacturing a patterned medium according to claim 3 , wherein the carbon compound is at least one of carbon compounds selected from a hydrocarbon compound, a carbon fluoride compound, and a fluorine-containing hydrocarbon compound.
5. The method of manufacturing a patterned medium according to claim 3 , wherein the carbon compound is methane.