IP Library Granted Patent US 8,232,134
Granted Patent B2
US 8,232,134 · App. 12/558,108 · Granted Jul 31, 2012

Rapid thermal method and device for thin film tandem cell

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Quick Facts
Patent No.
US 8,232,134
App. No.
12/558,108
Granted
Jul 31, 2012
Kind
B2
Abstract

A method for forming a thin film photovoltaic device. The method includes providing a transparent substrate comprising a surface region. A first transparent electrode layer is formed overlying the surface region. A multilayered structure including a copper material and an indium material is formed overlying a electrode surface region. The multilayered structure is subjected to a plurality of sulfur bearing entities during a rapid thermal process to form an absorber material comprising a copper entity, an indium entity, and a sulfur entity. The rapid thermal process uses a ramp time ranging from about 10 Degrees Celsius/second to about 50 Degrees Celsius/second. In a specific embodiment, the first transparent electrode layer is maintained to a sheet resistance of less than or equal to about 10 Ohms/square centimeters and an optical transmission of 90 percent and greater.

Claims (51)

1. A method for forming a thin film photovoltaic device, the method comprising:

providing a transparent substrate comprising a surface region;

forming a first transparent electrode layer overlying the surface region of the transparent substrate, the first transparent electrode layer having an electrode surface region

forming a multilayered structure including a copper material and an indium material overlying the electrode surface region;

subjecting the multilayered structure to a plurality of sulfur bearing entities;

subjecting the multilayered structure to a rapid thermal process using a ramp time ranging from about 10 Degrees Celsius/second to about 50 Degrees Celsius/second during the subjecting of the sulfur bearing entities to form an absorber material comprising a copper entity, an indium entity, and a sulfur entity;

forming a cap layer overlying the absorber material;

exposing the cap layer to a solution comprising an etchant;

selectively removing a portion of the cap layer; and

maintaining the first transparent electrode layer to a sheet resistance of less than or equal to about 10 Ohms/square centimeters and an optical transmission of 90 percent and greater.

2. The method of claim 1 further comprising forming a window layer overlying the absorber layer.

3. The method of claim 1 wherein the absorber material comprises a copper indium disulfide material from at least the rapid thermal process of the multi-layered structure, the copper indium disulfide comprising an atomic ratio of copper:indium ranging from about 1:35:1 to about 1:60:1.

4. The method of claim 1 wherein the rapid thermal process having a dwell time of about 1 to 10 minutes at a final temperature ranging from about 400 Degrees Celsius to about 600 Degrees Celsius, and further comprising ramping from the final temperature to a second temperature while subjecting the absorber material to nitrogen gas or argon gas.

5. The method of claim 1 wherein the absorber material is characterized by a band gap energy of about 1.6 to about 1.9 eV.

6. The method of claim 1 wherein the absorber material is selected from a group consisting of : CuInS 2 , Cu(InAl)S 2 , CuInGaS 2 , Cu 2 SnS, or Cu 2 ZnSnS 4 .

7. The method of claim 2 wherein the window layer is selected from a group consisting of a cadmium sulfide, a zinc sulfide, zinc selenium (ZnSe), zinc oxide (ZnO), or zinc magnesium oxide (ZnMgO).

8. The method of claim 7 further comprising forming a transparent conductive oxide overlying a portion of the window layer.

9. The method of claim 1 wherein the copper material is provided before the indium material.

10. The method of claim 1 further comprising coupling the thin film photovoltaic device to a second thin film photovoltaic device, the thin film photovoltaic device is a top cell and the second thin film photovoltaic device is a bottom cell.

11. The method of claim 1 wherein the thin film photovoltaic cell is characterized by a conversion efficiency greater than about 8%.

12. A method for forming a thin film photovoltaic device, the method comprising:

providing a transparent substrate comprising a surface region;

forming a first transparent electrode layer overlying the surface region of the transparent substrate, the first transparent electrode layer having an electrode surface region;

forming a window layer overlying the first transparent electrode layer;

forming a multilayered structure including a copper material and an indium material overlying the window layer;

subjecting the multilayered structure to a plurality of sulfur bearing entities;

subjecting the multilayered structure to a rapid thermal process using a ramp time ranging from about 10 Degrees Celsius/second to about 50 Degrees Celsius/second during the subjecting of the sulfur bearing entities to form an absorber material comprising a copper entity, an indium entity, and a sulfur entity;

forming a cap layer overlying the absorber material, the cap layer comprising substantially of copper sulfide material;

exposing the cap layer to a solution comprising an etchant;

selectively removing a portion of the cap layer; and

maintaining the first transparent electrode layer to a sheet resistance of less than or equal to about 10 Ohms/square centimeters and an optical transmission of 90 percent and greater.

13. The method of claim 12 wherein the absorber material comprises a copper indium disulfide material from at least the rapid thermal process of the multi-layered structure, the copper indium disulfide comprising an atomic ratio of copper:indium ranging from about 1:35:1 to about 1:60:1.

14. The method of claim 12 wherein the rapid thermal process having a dwell time of about 1 to 10 minutes at a final temperature ranging from about 400 Degrees Celsius to about 600 Degrees Celsius, and further comprising ramping from the final temperature to a second temperature while subjecting the absorber material to nitrogen gas or argon gas.

15. The method of claim 12 wherein the absorber material is characterized by a band gap energy of about 1.6 to about 1.9 eV.

16. The method of claim 12 wherein the absorber material is selected from a group consisting of : CuInS 2 , Cu(InAl)S 2 , CuInGaS 2 , Cu 2 SnS, or Cu 2 ZnSnS 4 .

17. The method of claim 12 wherein the window layer is selected from a group consisting of a cadmium sulfide, a zinc sulfide, zinc selenium (ZnSe), zinc oxide (ZnO), or zinc magnesium oxide (ZnMgO).

18. The method of claim 12 wherein the copper material is provided before t the indium material.

19. The method of claim 12 further comprising coupling the thin film photovoltaic device to a second thin film photovoltaic device, the thin film photovoltaic device is a top cell and the second thin film photovoltaic device is a bottom cell.

20. The method of claim 12 further comprising forming a second electrode layer overlying the absorber material.

21. The method of claim 20 wherein the second electrode layer is comprises a transparent electrode material.

22. The method of claim 12 wherein the thin film photovoltaic cell is characterized by a conversion efficiency greater than about 8%.

23. A method for treating a photovoltaic thin film, the method comprising:

providing a transparent substrate comprising a surface region;

forming a first transparent electrode layer overlying the surface region, the first transparent electrode layer having an electrode surface region;

forming a window layer overlying the first transparent electrode layer;

forming a multilayer structure comprising copper species and indium species overlying the window layer;

subjecting the multilayer structure to a thermal treatment process using a ramp rate about 10 Degrees Celsius per second ramping from room temperature to a first stage at about 250 to 300 Degrees Celsius followed by a second stage at about 475-500Degrees Celsius and a third stage at about 525-550 Degrees Celsius, wherein the thermal treatment process is performed in a sulfur bearing environment for transforming the multilayer structure to a photovoltaic absorber material comprising copper, indium, and sulfur species;

forming a cap layer overlying the photovoltaic absorber material, the cap layer comprising substantially of copper sulfide material;

exposing the cap layer to a solution comprising an etchant;

selectively removing a portion of the cap layer; and

maintaining the first transparent electrode layer to a sheet resistance of less than about 10 Ohms/cm 2 and an optical transmission of 90 percent and greater by controlling dwell time at each of the first stage, the second stage, and the third stage.

Assignments (4)
CHANGE OF NAME Recorded Feb 21, 2014
From: HETF SOLAR INC.
To: STION CORPORATION
Reel/Frame 032324/0402 →
SECURITY AGREEMENT Recorded Feb 10, 2014
From: DEVELOPMENT SPECIALIST, INC., SOLELY IN ITS CAPACITY AS THE ASSIGNEE FOR THE BENEFIT OF THE CREDITORS OF CM MANUFACTURING, INC. (F/K/A STION CORPORATION), AND CM MANUFACTURING (F/K/A STION CORPORATION)
To: HETF SOLAR INC.
Reel/Frame 032209/0879 →
CHANGE OF NAME Recorded Jan 30, 2014
From: STION CORPORATION
To: CM MANUFACTURING, INC.
Reel/Frame 032144/0774 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 2, 2009
From: LEE, HOWARD W.H.
To: STION CORPORATION
Reel/Frame 023589/0642 →