Magnetic recording head, method of manufacturing the same, and magnetic recording/reproducing device
View Patent ↗According to one embodiment, a magnetic recording head includes a main pole having a throat height portion and a flare portion that is connected to the throat height portion, the flare portion gradually being expanded in width to an upper part in an element height direction. The head also includes a sub pole, magnetic shields disposed via a nonmagnetic layer on a trailing side of the main pole and on both sides in a track width direction of the main pole, and a coil for generating a recording magnetic field from the main pole. The nonmagnetic layer has an upper portion of which the thickness is increased stepwise or in a tapered manner in the element height direction with respect to an ABS side, and each portion of the magnetic shields adjacent to the main pole has a shape corresponding to a surface shape of the nonmagnetic layer.
1. A magnetic recording head, comprising:
a main pole having a throat height portion and a flare portion that is connected to the throat height portion, the main pole gradually being expanded in width to an upper part thereof in an element height direction;
a sub pole;
magnetic shields disposed via a nonmagnetic layer on a trailing side of the main pole and on both sides thereof in a track width direction of the main pole; and
a coil for generating a recording magnetic field from the main pole,
wherein the nonmagnetic layer has a portion of which the thickness is increased stepwise or increased in a tapered manner in an upper part in the element height direction with respect to an air bearing surface side facing a recording medium, and
wherein each portion of the magnetic shields adjacent to the main pole has a shape corresponding to a surface shape of the nonmagnetic layer.
2. The magnetic recording head according to claim 1 :
wherein the nonmagnetic layer is formed along the throat height portion and the flare portion, and
wherein a thickness of the nonmagnetic layer is different between the throat height portion and the flare portion.
3. The magnetic recording head according to claim 1 , wherein a thickness change point of the nonmagnetic layer is provided in the throat height portion.
4. The magnetic recording head according to claim 1 , wherein the nonmagnetic layer is changed in thickness in two stages on a trailing side of the throat height portion.
5. The magnetic recording head according to claim 1 , wherein the nonmagnetic layer has a region in which thickness is gradually increased in the element height direction on a trailing side of the throat height portion.
6. A method of manufacturing a magnetic recording head, the method comprising:
processing a magnetic film formed on a substrate to form a pole tip of a main pole, the pole tip having a throat height portion and a flare portion;
forming a nonmagnetic layer, including enclosing the pole tip;
forming an etching layer on the nonmagnetic layer;
flattening the etching layer;
forming a hard layer on the flattened etching layer, the hard layer including an oxide film, a nitride film, or a metal film having a large processing selection ratio to the etching layer;
removing a region in the hard layer, the region corresponding to an air bearing surface side with respect to a straight line crossing the throat height portion of the pole tip at a predetermined position;
etching the etching layer with the hard layer as a mask;
processing the nonmagnetic layer by ion milling using the hard layer and the etching layer as a mask so that a level difference is formed in the nonmagnetic layer covering the throat height portion of the pole tip of the main pole; and
forming a magnetic layer as a shield after removing the etching layer.
7. The method of manufacturing a magnetic recording head according to claim 6 :
wherein the etching layer is an organic resin layer; and
wherein the flattening is performed using reactive ion milling until the level difference is decreased to at most a depth of focus of an aligner used in the photolithography.
8. A magnetic recording device, comprising:
a magnetic recording medium;
a motor that drives the magnetic recording medium;
a magnetic head mounted with a recording head; and
a head drive section that drives the magnetic head onto a desired track position of the magnetic recording medium,
wherein the recording head includes a main pole having:
a throat height portion;
a flare portion that is connected to the throat height portion;
a sub pole;
magnetic shields disposed via a nonmagnetic layer on a trailing side of the main pole and on both sides thereof in a track width direction of the main pole; and
a coil for generating a recording magnetic field from the main pole,
wherein the flare portion is gradually expanded in width to an upper part thereof in an element height direction,
wherein the nonmagnetic layer has a portion of which the thickness is increased stepwise or increased in a tapered manner in an upper part in the element height direction with respect to an air bearing surface side facing a recording medium, and
wherein each portion of the magnetic shields adjacent to the main pole has a shape corresponding to a surface shape of the nonmagnetic layer.
9. The magnetic recording head according to claim 8 :
wherein the nonmagnetic layer is formed along the throat height portion and the flare portion, and
wherein a thickness of the nonmagnetic layer is different between the throat height portion and the flare portion.
10. The magnetic recording head according to claim 8 , wherein a thickness change point of the nonmagnetic layer is provided in the throat height portion.
11. The magnetic recording head according to claim 8 , wherein the nonmagnetic layer is changed in thickness in two stages on a trailing side of the throat height portion.
12. The magnetic recording head according to claim 8 , wherein the nonmagnetic layer has a region in which thickness is gradually increased in the element height direction on a trailing side of the throat height portion.