Display device and manufacturing method thereof
View Patent ↗According to an embodiment of the present invention, a manufacturing method of a display device includes forming a plurality of gate wires comprising a gate electrode on an insulating substrate, forming an electrode layer comprising a source electrode and a drain electrode spaced apart from each other to define a channel region on the gate electrode interposed therebetween, forming a first barrier wall having a first opening for exposing the channel region, a portion of the source electrode, and a portion of the drain electrode on the electrode layer where the first barrier wall has a surface, forming a shielding film to cover the channel region inside the first opening, treating the surface of the first barrier wall, removing the shielding film, and forming an organic semiconductor layer inside the first opening.
1. A method of manufacturing a display device, comprising:
forming a plurality of gate wires comprising a gate electrode on an insulating substrate;
forming a gate insulating film on the gate electrode;
forming an electrode material layer on the gate insulating film;
forming a first barrier wall on the electrode material layer, the first barrier wall having a first opening for exposing at least a portion of the electrode material layer;
treating a surface of the first barrier wall to make it hydrophobic;
after the treating, forming an electrode layer comprising a source electrode and a drain electrode that are spaced apart from each other on the gate electrode by patterning the electrode material layer so as to expose a portion of the gate insulating film;
and forming an organic semiconductor layer inside the first opening.
2. The method according to claim 1 , wherein the electrode material layer comprises a transparent conductive material.
3. The method according to claim 2 , wherein forming the electrode layer comprises:
forming a photosensitive film on the first barrier wall and the electrode material layer;
positioning a mask with an aperture of a predetermined pattern on the photosensitive film; light-exposing a portion of the photosensitive film through the mask aperture;
developing the photosensitive film such that only the photosensitive film corresponding to a region to be formed as the electrode layer remains;
etching the electrode material layer using the photosensitive film; and
removing the photosensitive film.
4. The method according to claim 2 , further comprising:
forming a plurality of data wires which are insulated from and which cross the gate wires to define a pixel between the insulating substrate and the gate wires; and
forming an interlayer insulating film to cover the data wires.
5. The method according to claim 4 , wherein the forming of the gate insulating film comprises:
forming a second barrier wall with a second opening for exposing the gate electrode on the interlayer insulating film; and
forming the gate insulating film inside the second opening through an ink jet method.
6. The method according to claim 5 , wherein the plurality of data wires include a data line, the method further comprising:
forming simultaneously a barrier wall contact hole for exposing a portion of the interlayer insulating film together with the second opening on the second barrier wall; and
forming an insulating film contact hole on the interlayer insulating film to expose a portion of the data line that corresponds to the barrier wall contact hole.
7. The method according to claim 6 , further comprising:
forming an insulating film contact hole for exposing a portion of the data line on the interlayer insulating film after the interlayer insulating film has been formed; and
forming simultaneously a barrier wall contact hole corresponding to the insulating film contact hole together with the second opening on the second barrier wall.