Temperature control of micromachined transducers
View Patent ↗A micromachined structure, comprises a substrate and a cavity in the substrate. The micromachined structure comprises a membrane layer disposed over the substrate and spanning the cavity.
1. A micromachined structure, comprising:
a substrate having a first coefficient of thermal expansion;
a cavity in the substrate; and
a membrane layer having a second coefficient of thermal expansion and disposed over the substrate and spanning the cavity, wherein the first coefficient of thermal expansion is substantially identical to the second coefficient of thermal expansion; and
an annular resonator disposed over the membrane and comprising a first electrode, a second electrode and a piezoelectric layer between the first and second electrodes.
2. A micromachined structure as claimed in claim 1 , wherein the membrane layer has a thickness that is greater than a combined thickness of the first electrode, the second electrode and the piezoelectric layer.
3. A micromachined structure as claimed in claim 1 , wherein the membrane layer comprises borosilicate glass (BSG).
4. A micromachined structure as claimed in claim 1 , wherein the cavity spans a first width and is provided in a surface of the substrate, and the micromachined structure further comprises an opening in the substrate that spans a second width in an opposing surface of the substrate.
5. A micromachined structure as claimed in claim 1 , wherein the membrane layer is provided over a surface of the substrate, and the substrate comprises an opposing surface, and the micromachined structure further comprises a vent between the cavity and the surface of the substrate.
6. A micromachined structure as claimed in claim 4 , wherein the opening is disposed on tandem with the cavity.
7. A micromachined structure as claimed in claim 1 , wherein the membrane layer comprises one of: polysilicon (poly-Si), or silicon nitride (Si 3 N 4 ) or silicon carbide (SiC), or monocrystalline silicon.
8. A micromachined structure as claimed in claim 2 , wherein the first and second electrodes of the annular resonator are substantially circular.
9. A micromachined structure as claimed in claim 2 , wherein the first and second electrodes of the annular resonator are substantially square.
10. A piezoelectric micromachined transducer (PMT) array, comprising:
a substrate;
a plurality of PMTs arranged over the substrate, each of the PMTs comprising:
a cavity in the substrate;
membrane layer disposed over the substrate and spanning the cavity;
an annular resonator disposed over the membrane and comprising a first electrode, a second electrode and a piezoelectric layer between the first and second electrodes.
11. A PMT array as claimed in claim 10 , wherein cavity of at least one of the PMTs spans a first width and is provided in a surface of the substrate, and the at least one PMT further comprises an opening in the substrate that spans a second width in an opposing surface of the substrate.
12. A PMT array as claimed in claim 10 , wherein the membrane layer of at least one of the PMTs is provided over a surface of the substrate, and the substrate comprises an opposing surface, and the at least one PMT further comprises a vent between the cavity and the surface of the substrate.
13. A PMT array as claimed in claim 12 , wherein the membrane layer comprises borosilicate glass (BSG).