Semiconductor device and manufacturing method thereof
View Patent ↗Provided is a semiconductor device capable of having a single metal/dual high-k structure with a good shape and having flat band voltages suited for nMOS and pMOS, respectively. The semiconductor device according to the one embodiment of the present invention has a first conductivity type MOSFET and a second conductivity type MOSFET. The first and second conductivity type MOSFETs are each equipped with a first insulating film formed over a semiconductor substrate, a second insulating film formed over the first insulating film and made of an insulating material having a higher dielectric constant than the first insulating film, and a gate electrode formed over the second insulating film and having, as a lower layer of the gate electrode, a metal layer containing a material which diffuses into the second insulating film to control a work function thereof. The second conductivity type MOSFET is equipped further with a diffusion barrier film formed between the first insulating film and the second insulating film to prevent diffusion of a work-function controlling material into the interface of the first insulating film.
1. A semiconductor device comprising a first conductivity type MOSFET and a second conductivity type MOSFET,
wherein the first conductivity type MOSFET comprises:
a first insulating film formed over a semiconductor substrate;
a second insulating film formed over the first insulating film and containing hafnium, a rare earth element or Mg, and oxygen as main components, comprised of an insulating material having a higher dielectric constant than the first insulating film; and
a first gate electrode formed over the second insulating film and having a first metal layer comprising any one of TiN and TaN; and
wherein the second conductivity type MOSFET comprises:
a third insulating film aligned with the first insulating film over the semiconductor substrate over which the first insulating film is placed;
a fourth insulating film formed over the third insulating film and containing hafnium and oxygen as main components, comprised of an insulating material having a higher dielectric constant than the third insulating film;
a cap layer formed over the fourth insulating film and containing a rare earth element or Mg;
a second gate electrode formed over the cap layer and having a second metal layer comprising any one of TiN and TaN; and
a diffusion barrier film formed between the fourth insulating film and the cap layer to prevent diffusion of the rare earth element or Mg into the fourth insulating film,
wherein the diffusion barrier film comprises Al 2 O 3 or AlN.
2. The semiconductor device according to claim 1 ,
wherein the first conductivity type MOSFET is an n-MOSFET and the second conductivity type MOSFET is a p-MOSFET.