APPARATUS AND METHOD FOR PURGING AND RECHARGING EXCIMER LASER GASES
A method of recharging an excimer laser Includes opening an outlet in a chamber containing spent laser gas at a first pressure, opening an inlet in the chamber, the inlet in communication with a laser gas container at a second pressure higher than the first pressure, and flowing fresh laser gas into the chamber and removing at least a portion of the spent laser gases from the chamber without using a vacuum pump.
1 . A method of recharging an excimer laser, the method comprising:
opening an outlet in a chamber containing spent laser gas at a first pressure;
opening an inlet in the chamber, the inlet in communication with a laser gas container at a second pressure higher than the first pressure; and
flowing fresh laser gas into the chamber while removing at least a portion of the spent laser gas from the chamber without using a vacuum pump and while the excimer laser is not running.
2 . The method of claim 1 , wherein the outlet is opened prior to opening the inlet or the inlet is opened prior to opening the outlet.
3 . The method of claim 1 , wherein the inlet and the outlet are opened simultaneously.
4 . The method of claim 1 , further comprising:
closing the outlet; and
closing the inlet after the chamber is pressurized with the fresh laser gas.
5 . The method of claim 1 , wherein the first pressure is greater than an ambient pressure.
6 . The method of claim 1 , wherein the flowing removes a substantial portion of the spent laser gas.
7 . The method of claim 1 , wherein the flowing removes a majority of the spent laser gas.
8 . The method of claim 1 , wherein opening an outlet, opening an inlet, and flowing fresh laser gas are performed automatically.
9 . The method of claim 1 , wherein the spent laser gas comprises a mixture of gases.
10 . The method of claim 1 , wherein the fresh laser gas comprises a mixture of gases.
11 . A method of recharging an excimer laser, the method comprising:
opening an outlet in a chamber containing a first gas at a first pressure;
opening an inlet in the chamber, the inlet in communication with a container containing a second gas at a second pressure higher than the first pressure of the first gas in the chamber; and
flowing the second gas from the container into the chamber while substantially removing the first gas from the chamber without using a vacuum pump.
12 . The method of claim 11 , wherein the outlet is opened prior to opening the inlet or the inlet is opened prior to opening the outlet.
13 . The method of claim 11 , wherein the inlet and the outlet are opened simultaneously.
14 . The method of claim 11 , further comprising:
closing the outlet; and
closing the inlet after the chamber is pressurized with the fresh laser gas.
15 . The method of claim 11 , wherein the first gas comprises laser gas.
16 . The method of claim 11 , wherein the first gas comprises an inert gas.
17 . The method of claim 16 , wherein the second gas comprises laser gas.
18 . The method of claim 11 , wherein opening an outlet, opening an inlet, and flowing the second gas are performed automatically.
19 . The method of claim 11 , wherein the first gas comprises a mixture of gases.
20 . The method of claim 11 , wherein the second gas comprises a mixture of gases.
21 . A method of recharging an excimer laser, the method comprising:
opening an outlet in a chamber containing spent laser gas at a first pressure;
opening an inlet in the chamber, the inlet in communication with a laser gas container at a second pressure higher than the first pressure; and
flowing fresh laser gas into the chamber and removing at least a portion of the spent laser gas from the chamber with both the inlet and outlet open while the excimer laser is not lasing.
22 . The method of claim 21 , wherein the flowing removes a substantial portion of the spent laser gas.
23 . The method of claim 21 , wherein the flowing removes a majority of the spent laser gas.
24 . The method of claim 21 , wherein opening an outlet, opening an inlet, and flowing fresh laser gas are performed automatically.
25 . The method of claim 21 , wherein the spent laser gas comprises a mixture of gases.
26 . The method of claim 21 , wherein the fresh laser gas comprises a mixture of gases.
27 . An apparatus for recharging an excimer laser, the apparatus comprising:
a first valve for opening and closing an outlet in a laser chamber containing spent laser gas at a first pressure;
a second valve for an inlet in the chamber, the inlet in fluid communication with a laser gas container at a second pressure higher than the first pressure; and
a controller in communication with the first and second valves, the controller configured to open the first and second valves such that at least a portion of the spent laser gas is removed while fresh laser gas from the laser gas container is introduced without using a vacuum pump;
wherein the laser gas container is the only gas container in fluid communication with the chamber that provides excimer laser gas.
28 . The apparatus of claim 27 , wherein the controller comprises a microprocessor.
29 . The apparatus of claim 27 , wherein the controller is configured to open the first and second values automatically.
30 . The apparatus of claim 27 , wherein the spent laser gas comprises a mixture of gases.
31 . The apparatus of claim 27 , wherein the fresh laser gas comprises a mixture of gases.