ALUMINUM ALLOY SUBSTRATE AND A METHOD OF MANUFACTURING THE SAME
An aluminum alloy substrate having nano-holes in an ordered arrangement is disclosed, as well as a method of manufacturing such an aluminum alloy substrate. The aluminum alloy substrate of the invention includes a substrate, a first underlayer, a second underlayer, and an aluminum-containing layer including a lower layer portion composed of an amorphous aluminum alloy and an amorphous surface layer portion containing alumina, the surface layer portion having a plurality of nano-holes formed thereon.
1 . An aluminum alloy substrate comprising:
a substrate;
a first underlayer;
a second underlayer; and
an aluminum-containing layer including a lower layer portion composed of an amorphous aluminum alloy and an amorphous surface layer portion containing alumina, the surface layer portion having a plurality of nano-holes formed thereon.
2 . The aluminum alloy substrate according to claim 1 , wherein the aluminum alloy is selected from the group consisting of an Al—Mo alloy, an Al—Ta alloy, an Al—Ti alloy, and an Al—W alloy.
3 . A method of manufacturing an aluminum alloy substrate comprising:
a step of successively forming a first underlayer and a second underlayer on a substrate;
a step of forming an aluminum-containing layer composed of an amorphous aluminum alloy on the second underlayer; and
a step of oxidizing the aluminum-containing layer to form an amorphous alumina-containing layer having a plurality of nano-holes formed in a surface layer portion of the aluminum-containing layer.
4 . The method of manufacturing an aluminum alloy substrate according to claim 3 , wherein the aluminum alloy is selected from the group consisting of an Al—Mo alloy, an Al—Ta alloy, an Al—Ti alloy, and an Al—W alloy.