Continuous feed chemical vapor deposition
View Patent ↗Embodiments of the invention generally relate to a method for forming a multi-layered material during a continuous chemical vapor deposition (CVD) process. In one embodiment, a method for forming a multi-layered material during a continuous CVD process is provided which includes continuously advancing a plurality of wafers through a deposition system having at least four deposition zones. Multiple layers of materials are deposited on each wafer, such that one layer is deposited at each deposition zone. The methods provide advancing each wafer through each deposition zone while depositing a first layer from the first deposition zone, a second layer from the second deposition zone, a third layer from the third deposition zone, and a fourth layer from the fourth deposition zone. Embodiments described herein may be utilized to form an assortment of materials on wafers or substrates, especially for forming Group III/V materials on GaAs wafers.
1. A method for forming a multi-layered material, comprising:
advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a first deposition zone, a second deposition zone, a third deposition zone, and a fourth deposition zone;
depositing a buffer layer on a first wafer within the first deposition zone;
depositing a sacrificial layer on the first wafer within the second deposition zone, while depositing the buffer layer on a second wafer within the first deposition zone;
depositing a passivation layer on the first wafer within the third deposition zone, while depositing the sacrificial layer on the second wafer within the second deposition zone, and while depositing the buffer layer on a third wafer within the first deposition zone; and
depositing a gallium arsenide active layer on the first wafer within the fourth deposition zone by an epitaxial process, while depositing the passivation layer on the second wafer within the third deposition zone, while depositing the sacrificial layer on the third wafer within the second deposition zone, and while depositing the buffer layer on a fourth wafer within the first deposition zone.
2. A method for forming a multi-layered material during a continuous chemical vapor deposition process, comprising:
continuously advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a first deposition zone, a second deposition zone, a third deposition zone, and a fourth deposition zone;
depositing a buffer layer on a first wafer within the first deposition zone;
depositing a sacrificial layer on the first wafer within the second deposition zone, while depositing the buffer layer on a second wafer within the first deposition zone;
depositing a passivation layer on the first wafer within the third deposition zone, while depositing the sacrificial layer on the second wafer within the second deposition zone, and while depositing the buffer layer on a third wafer within the first deposition zone; and
depositing a gallium arsenide active layer on the first wafer within the fourth deposition zone, while depositing the passivation layer on the second wafer within the third deposition zone, while depositing the sacrificial layer on the third wafer within the second deposition zone, and while depositing the buffer layer on a fourth wafer within the first deposition zone, further comprising heating each of the wafers to a predetermined temperature within a heat-up zone prior to advancing into the first deposition zone.
3. The method of claim 2 , wherein the predetermined temperature is within a range from about 50° C. to about 750° C.
4. The method of claim 3 , wherein the predetermined temperature is within a range from about 100° C. to about 350° C.
5. A method for forming a multi-layered material during a continuous chemical vapor deposition process, comprising:
continuously advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a first deposition zone, a second deposition zone, a third deposition zone, and a fourth deposition zone;
depositing a buffer layer on a first wafer within the first deposition zone;
depositing a sacrificial layer on the first wafer within the second deposition zone, while depositing the buffer layer on a second wafer within the first deposition zone;
depositing a passivation layer on the first wafer within the third deposition zone, while depositing the sacrificial layer on the second wafer within the second deposition zone, and while depositing the buffer layer on a third wafer within the first deposition zone; and
depositing a gallium arsenide active layer on the first wafer within the fourth deposition zone, while depositing the passivation layer on the second wafer within the third deposition zone, while depositing the sacrificial layer on the third wafer within the second deposition zone, and while depositing the buffer layer on a fourth wafer within the first deposition zone, further comprising transferring each of the wafers into a cool-down zone subsequent to depositing the gallium arsenide active layer.
6. The method of claim 5 , further comprising cooling each of the wafers to a predetermined temperature within a range from about 18° C. to about 30° C. while in the cool-down zone.
7. A method for forming a multi-layered material during a continuous chemical vapor deposition process, comprising:
continuously advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a first deposition zone, a second deposition zone, a third deposition zone, and a fourth deposition zone;
depositing a buffer layer on a first wafer within the first deposition zone;
depositing a sacrificial layer on the first wafer within the second deposition zone, while depositing the buffer layer on a second wafer within the first deposition zone;
depositing a passivation layer on the first wafer within the third deposition zone, while depositing the sacrificial layer on the second wafer within the second deposition zone, and while depositing the buffer layer on a third wafer within the first deposition zone; and
depositing a gallium arsenide active layer on the first wafer within the fourth deposition zone, while depositing the passivation layer on the second wafer within the third deposition zone, while depositing the sacrificial layer on the third wafer within the second deposition zone, and while depositing the buffer layer on a fourth wafer within the first deposition zone, wherein the wafers pass through a heat-up zone prior to entering the first deposition zone and the wafers pass through a cool-down zone subsequent to exiting the fourth deposition zone.
8. The method of claim 7 , wherein the heat-up zone, the first, second, third, and fourth deposition zones, and the cool-down zone share a common linear path, and the wafers continuously and horizontally advance along the common linear path within the deposition system.
9. The method of claim 1 , further comprising flowing at least one gas between each of the deposition zones to form gas curtains therebetween.
10. A method for forming a multi-layered material during a continuous chemical vapor deposition process, comprising:
continuously advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a first deposition zone, a second deposition zone, a third deposition zone, and a fourth deposition zone;
depositing a buffer layer on a first wafer within the first deposition zone;
depositing a sacrificial layer on the first wafer within the second deposition zone, while depositing the buffer layer on a second wafer within the first deposition zone;
depositing a passivation layer on the first wafer within the third deposition zone, while depositing the sacrificial layer on the second wafer within the second deposition zone, and while depositing the buffer layer on a third wafer within the first deposition zone; and
depositing a gallium arsenide active layer on the first wafer within the fourth deposition zone, while depositing the passivation layer on the second wafer within the third deposition zone, while depositing the sacrificial layer on the third wafer within the second deposition zone, and while depositing the buffer layer on a fourth wafer within the first deposition zone, further comprising flowing at least one gas between each of the deposition zones to form gas curtains therebetween, wherein the at least one gas comprises hydrogen, arsine, a mixture of hydrogen and arsine, nitrogen, argon, or combinations thereof.
11. The method of claim 10 , wherein the at least one gas comprises a mixture of hydrogen and arsine.
12. The method of claim 1 , further comprising depositing a gallium-containing layer on the first wafer within a fifth deposition zone, while depositing the gallium arsenide active layer on the second wafer within the fourth deposition zone, while depositing the passivation layer on the third wafer within the third deposition zone, while depositing the sacrificial layer on the fourth wafer within the second deposition zone, and while depositing the buffer layer on a fifth wafer within the first deposition zone.
13. The method of claim 12 , wherein the gallium-containing layer comprises a phosphorous gallium arsenide.
14. The method of claim 1 , wherein the wafers are gallium arsenide wafers.
15. A method for forming a multi-layered material, comprising:
advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a heat-up zone, a first deposition zone, a second deposition zone, a third deposition zone, a fourth deposition zone, and a cool-down zone;
depositing a gallium arsenide buffer layer on a first wafer within the first deposition zone;
depositing an aluminum arsenide sacrificial layer on the first wafer within the second deposition zone, while depositing the gallium arsenide buffer layer on a second wafer within the first deposition zone;
depositing an aluminum gallium arsenide passivation layer on the first wafer within the third deposition zone, while depositing the aluminum arsenide sacrificial layer on the second wafer within the second deposition zone, and while depositing the gallium arsenide buffer layer on a third wafer within the first deposition zone; and
depositing a gallium arsenide active layer on the first wafer within the fourth deposition zone using an epitaxial deposition process, while depositing the aluminum gallium arsenide passivation layer on the second wafer within the third deposition zone, while depositing the aluminum arsenide sacrificial layer on the third wafer within the second deposition zone, and while depositing the gallium arsenide buffer layer on a fourth wafer within the first deposition zone; and
flowing at least one gas between each of the deposition zones to form gas curtains therebetween.
16. A method for forming a multi-layered material, comprising:
advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a first deposition zone, a second deposition zone, a third deposition zone, and a fourth deposition zone;
depositing a first material layer on a first wafer within the first deposition zone;
depositing a second material layer on the first wafer within the second deposition zone, while depositing the first material layer on a second wafer within the first deposition zone;
depositing a third material layer on the first wafer within the third deposition zone, while depositing the second material layer on the second wafer within the second deposition zone, and while depositing the first material layer on a third wafer within the first deposition zone; and
depositing a fourth material layer on the first wafer within the fourth deposition zone, while depositing the third material layer on the second wafer within the third deposition zone, while depositing the second material layer on the third wafer within the second deposition zone, and while depositing the first material layer on a fourth wafer within the first deposition zone;
heating each of the wafers to a predetermined temperature within a heat-up zone prior to advancing into the first deposition zone; and
flowing at least one gas between each of the deposition zones to form gas curtains therebetween.
17. The method of claim 16 , wherein the first material layer, the second material layer, the third material layer, and the fourth material layer have the same composition.
18. The method of claim 16 , wherein each of the first material layer, the second material layer, the third material layer, and the fourth material layer has a different composition.
19. The method of claim 16 , wherein each of the first material layer, the second material layer, the third material layer, and the fourth material layer comprises arsenic.
20. The method of claim 16 , further comprising depositing a fifth material layer on the first wafer within a fifth deposition zone, while depositing the fourth material layer on the second wafer within the fourth deposition zone, while depositing the third material layer on the third wafer within the third deposition zone, while depositing the second material layer on the fourth wafer within the second deposition zone, and while depositing the first material layer on a fifth wafer within the first deposition zone.
21. A method for forming a multi-layered material during a continuous chemical vapor deposition process, comprising:
continuously advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a first deposition zone, a second deposition zone, a third deposition zone, and a fourth deposition zone;
depositing a first material layer on a first wafer within the first deposition zone;
depositing a second material layer on the first wafer within the second deposition zone, while depositing the first material layer on a second wafer within the first deposition zone;
depositing a third material layer on the first wafer within the third deposition zone, while depositing the second material layer on the second wafer within the second deposition zone, and while depositing the first material layer on a third wafer within the first deposition zone; and
depositing a fourth material layer on the first wafer within the fourth deposition zone, while depositing the third material layer on the second wafer within the third deposition zone, while depositing the second material layer on the third wafer within the second deposition zone, and while depositing the first material layer on a fourth wafer within the first deposition zone, further comprising heating each of the wafers to a predetermined temperature within a heat-up zone prior to advancing into the first deposition zone.
22. The method of claim 21 , wherein the predetermined temperature is within a range from about 50° C. to about 750° C.
23. The method of claim 22 , wherein the predetermined temperature is within a range from about 100° C. to about 350° C.
24. The method of claim 22 , wherein each of the wafers is heated to the predetermined temperature for a duration within a range from about 2 minutes to about 6 minutes.
25. The method of claim 24 , wherein the duration is within a range from about 3 minutes to about 5 minutes.
26. A method for forming a multi-layered material during a continuous chemical vapor deposition process, comprising:
continuously advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a first deposition zone, a second deposition zone, a third deposition zone, and a fourth deposition zone;
depositing a first material layer on a first wafer within the first deposition zone;
depositing a second material layer on the first wafer within the second deposition zone, while depositing the first material layer on a second wafer within the first deposition zone;
depositing a third material layer on the first wafer within the third deposition zone, while depositing the second material layer on the second wafer within the second deposition zone, and while depositing the first material layer on a third wafer within the first deposition zone; and
depositing a fourth material layer on the first wafer within the fourth deposition zone, while depositing the third material layer on the second wafer within the third deposition zone, while depositing the second material layer on the third wafer within the second deposition zone, and while depositing the first material layer on a fourth wafer within the first deposition zone, further comprising transferring each of the wafers into a cool-down zone subsequent to depositing the fourth material layer.
27. The method of claim 26 , further comprising cooling each of the wafers to a predetermined temperature while in the cool-down zone.
28. The method of claim 27 , wherein the predetermined temperature is within a range from about 18° C. to about 30° C.
29. The method of claim 27 , wherein each of the wafers is cooled to the predetermined temperature for a duration within a range from about 2 minutes to about 6 minutes.
30. The method of claim 29 , wherein the duration is within a range from about 3 minutes to about 5 minutes.
31. A method for forming a multi-layered material during a continuous chemical vapor deposition process, comprising:
continuously advancing a plurality of wafers through a deposition system, wherein the deposition system comprises a first deposition zone, a second deposition zone, a third deposition zone, and a fourth deposition zone;
depositing a first material layer on a first wafer within the first deposition zone;
depositing a second material layer on the first wafer within the second deposition zone, while depositing the first material layer on a second wafer within the first deposition zone;
depositing a third material layer on the first wafer within the third deposition zone, while depositing the second material layer on the second wafer within the second deposition zone, and while depositing the first material layer on a third wafer within the first deposition zone; and
depositing a fourth material layer on the first wafer within the fourth deposition zone, while depositing the third material layer on the second wafer within the third deposition zone, while depositing the second material layer on the third wafer within the second deposition zone, and while depositing the first material layer on a fourth wafer within the first deposition zone, wherein the wafers pass through a heat-up zone prior to entering the first deposition zone and the wafers pass through a cool-down zone subsequent to exiting the fourth deposition zone.
32. The method of claim 31 , wherein the heat-up zone, the first, second, third, and fourth deposition zones, and the cool-down zone share a common linear path which the wafers continuously and horizontally traverse along in one direction within the deposition system.