IP Library Granted Patent US 7,998,224
Granted Patent B2
US 7,998,224 · App. 12/580,719 · Granted Aug 16, 2011

Removal of a sheet from a production apparatus

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Quick Facts
Patent No.
US 7,998,224
App. No.
12/580,719
Granted
Aug 16, 2011
Kind
B2
Abstract

A melt of a material is cooled and a sheet of the material is formed in the melt. This sheet is transported, cut into at least one segment, and cooled in a cooling chamber. The material may be Si, Si and Ge, Ga, or GaN. The cooling is configured to prevent stress or strain to the segment. In one instance, the cooling chamber has gas cooling.

Claims (31)

1. A method comprising:

cooling a melt of a material with radiation cooling;

forming a solid sheet of said material floating on a surface of said melt;

transporting said sheet;

cutting said sheet into at east one segment; and

cooling said segment.

2. The method of claim 1 , wherein said material is selected from the group consisting of Si, Si and Ge, Ga, and GaN.

3. The method of claim 1 , further comprising separating said sheet from said melt using a spillway.

4. The method of claim 1 , wherein said cooling of said segment comprises gas cooling using a gas.

5. The method of claim 4 , wherein said cooling of said segment minimizes a lateral thermal gradient across a surface of said segment.

6. The method of claim 1 , wherein said cooling of said segment comprises lowering a temperature of said segment over time while maintaining lateral temperature uniformity across a surface of said segment.

7. The method of claim 6 , wherein said cooling of said segment is transverse across a thickness of said segment.

8. The method of claim 1 , wherein said transporting said sheet comprises said sheet and said surface of said melt moving at approximately the same speed prior to said cutting.

9. A method comprising:

cooling a melt of a material with radiation cooling;

forming a solid sheet of said material floating on a surface of said melt;

transporting said sheet;

cutting said sheet into at least one segment; and

cooling said segment using a gas configured to minimize a lateral thermal gradient across a surface of said segment.

10. The method of claim 9 , wherein said material is selected from the group consisting of Si, Si and Ge, Ga, and GaN.

11. The method of claim 9 , further comprising separating said sheet from said melt using a spillway.

12. The method of claim 9 , wherein said transporting said sheet comprises said sheet and said surface of said melt moving at approximately the same speed prior to said cutting.

13. A method comprising:

cooling a melt of a material with radiation cooling;

forming a solid sheet of said material floating on a surface of said melt;

transporting said sheet;

cutting said sheet into at least one segment; and

cooling said segment, wherein said cooling of said segment comprises lowering a temperature of said segment over time while maintaining lateral temperature uniformity across a surface of said segment and wherein said cooling is transverse across a thickness of said segment.

14. The method of claim 13 , wherein said material is selected from the group consisting of Si, Si and Ge, Ga, and GaN.

15. The method of claim 13 , further comprising separating said sheet from said melt using a spillway.

16. The method of claim 13 , wherein said transporting said sheet comprises said sheet and said surface of said melt moving at approximately the same speed prior to said cutting.

Assignments (4)
CHANGE OF NAME Recorded Dec 1, 2021
From: LEADING EDGE CRYSTAL TECHNOLOGIES, INC.
To: LEADING EDGE EQUIPMENT TECHNOLOGIES, INC.
Reel/Frame 058292/0241 →
ACQUISITION Recorded Jan 15, 2020
From: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
To: APPLIED MATERIALS, INC.
Reel/Frame 051973/0106 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 11, 2019
From: APPLIED MATERIALS, INC.
To: LEADING EDGE CRYSTAL TECHNOLOGIES, INC.
Reel/Frame 051247/0716 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 16, 2009
From: KELLERMAN, PETER L.; CARLSON, FREDERICK; SINCLAIR, FRANK
To: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
Reel/Frame 023384/0445 →