Image sensor and method of fabricating the same including a gate insulation layer, a gate electrode, a photodiode and a floating diffusion region
View Patent ↗An image sensor can include a gate insulation layer, a gate electrode, a photodiode, and a floating diffusion region. The gate insulation layer can be formed on and/or over a semiconductor substrate for a transfer transistor. The gate insulation layer includes a first gate insulation layer having a central opening and a second gate insulation layer formed on and/or over an uppermost surface of the first gate insulation layer including the opening. The gate electrode can be formed on and/or over the gate insulation layer. The photodiode can be formed in the semiconductor substrate at one side of the gate electrode so as to generate an optical charge. The floating diffusion region can be formed in the semiconductor at the other side of the gate electrode opposite to the photodiode. The floating diffusion region can be electrically connected to the photodiode through a channel so as to store the optical charge generated from the photodiode.
1. An apparatus comprising:
a gate insulation layer formed over a semiconductor substrate for a transfer transistor, the gate insulation layer including a first gate insulation layer having a central opening and a second gate insulation layer formed over the first gate insulation layer including the opening;
a gate electrode formed over the gate insulation layer;
a photodiode formed in the semiconductor substrate at one side of the gate electrode; and
a floating diffusion region formed in the semiconductor at another side of the gate electrode opposite to the photodiode, the floating diffusion region being electrically connected to the photodiode through a channel,
wherein the second gate insulation layer is in direct contact with an upper surface of the first gate insulation layer.
2. The apparatus of claim 1 , wherein a thickness of the first gate insulation layer is greater than a thickness of the second, gate insulation layer.
3. The apparatus of claim 2 , wherein the thickness of the first gate insulation layer is 28 Å.
4. The apparatus of claim 3 , wherein the thickness of the second gate insulation layer is 20 Å.
5. The apparatus of claim 1 , wherein a lowermost portion of the gate electrode is disposed in the central opening.