Spatial light modulator having capacitor
View Patent ↗The present invention provides an image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising a first conductive layer to wire and function as a bit line; a second conductive layer to wire and function as a word line; and a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor is disposed in parallel with the bit line.
1. An image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising:
a first conductive layer to wire and function as a bit line;
a second conductive layer to wire and function as a word line; and
a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor is disposed in parallel with the bit line.
2. The image projection system according to claim 1 , wherein:
the bit line is disposed away from and not vertically overlapping with the capacitor.
3. The spatial light modulator according to claim 1 , wherein:
the capacitor is disposed above the word line is extended along a direction crossing the capacitor.
4. The spatial light modulator according to claim 1 , wherein:
the capacitor has a metal-insulator-metal (MIM) structure includes an insulation film between the first conductive and second conductive capacitor layers.
5. The spatial light modulator according to claim 1 , wherein:
one of the first conductive second conductive capacitor layers are connected to a fixed electric potential.
6. The spatial light modulator according to claim 1 , wherein:
one of the first conductive second conductive capacitor layers is connected to a device ground potential.
7. The spatial light modulator according to claim 1 , wherein:
one of the first and second conductive capacitor layers constituting a lower conductive plate of the capacitor.
8. The spatial light modulator according to claim 1 , wherein:
one of the first and second conductive capacitor layers constituting an upper conductive plate of the capacitor.
9. The spatial light modulator according to claim 1 , wherein:
said spatial light modulator comprises a plurality of pixel elements and at least one of said pixel elements includes a first and second capacitors each includes said first and second conductive capacitor layers.
10. The spatial light modulator according to claim 1 , wherein:
said spatial light modulator comprises a plurality of pixel elements and at least one of said pixel elements includes a first and second capacitors each includes said first and second conductive capacitor layers wherein a bottom conductive capacitor layers of said first and second capacitors are electrically connected together.
11. The spatial light modulator according to claim 1 , wherein:
said spatial light modulator further comprises a plurality of pixel elements and each of said pixel elements includes said capacitor comprising said first and second conductive capacitor layers; wherein a distance between two capacitors of two adjacent pixel elements is shorter than 9 μm.
12. The spatial light modulator according to claim 1 , wherein:
an area size of the capacitor is smaller than 40 μm 2 .
13. The spatial light modulator according to claim 1 , wherein:
a capacitance of the capacitor is larger than 10 femto Farad (fF).
14. The spatial light modulator according to claim 1 , wherein:
said spatial light modulator further comprises a plurality of pixel elements and each of said pixel elements includes said capacitor comprising said first and second conductive capacitor layers; wherein a plurality of bottom conductive capacitor layers of the capacitors are electrically connected.
15. An image projection system implemented with a spatial light modulator (SLM) to modulate an illumination light projected from a light source wherein said SLM comprising:
a first conductive layer to wire and function as a bit line;
a second conductive layer to wire and function as a word line; and
a first conductive and second conductive capacitor layers functioning as a capacitor wherein the bit line is wired along a direction crossing the word line and the capacitor overlaps the word line.
16. The spatial light modulator according to claim 15 , wherein:
the capacitor overlaps the word line and is in parallel to the bit line.
17. The spatial light modulator according to claim 15 , wherein:
the capacitor has a metal-insulator-metal (MIM) structure includes an insulation film between the first conductive and second conductive capacitor layers.
18. The spatial light modulator according to claim 17 , wherein:
the insulation film of the capacitor is composed of a tantalum pentoxide (Ta 2 O 5 ).
19. The spatial light modulator according to claim 17 , wherein:
the insulation film of the capacitor is composed of a zirconium dioxide (ZrO 2 ).
20. The spatial light modulator according to claim 17 , wherein:
the insulation film of the capacitor comprises a layered film includes a first film composed of tantalum pentoxide (Ta 2 O 5 ) and a second film composed of a niobium pentoxide (Nb 2 O 5 ).
21. The spatial light modulator according to claim 15 , wherein:
the layers in which a capacitor is constituted are connected to a fixed electric potential,
one of the first conductive second conductive capacitor layers is connected to a fixed electric potential.
22. The spatial light modulator according to claim 15 , wherein:
one of the first conductive second conductive capacitor layers is connected to a device ground potential.
23. The spatial light modulator according to claim 15 , wherein:
one of the first and second conductive capacitor layers constituting a lower conductive plate of the capacitor.
24. The spatial light modulator according to claim 15 , wherein:
one of the first and second conductive capacitor layers constituting an upper conductive plate of the capacitor.
25. The spatial light modulator according to claim 15 , wherein:
said spatial light modulator further comprises a plurality of pixel elements and each of said pixel elements includes said capacitor comprising said first and second conductive capacitor layers; wherein a distance between two capacitors of two adjacent pixel elements is shorter than 9 μm.
26. The spatial light modulator according to claim 15 , wherein:
an area size of the capacitor is smaller than 40 μm 2 .
27. The spatial light modulator according to claim 15 , wherein:
a capacitance of the capacitor is larger than 10 femto Farad (fF).