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App. No. 12/589,033 · Confirmation No. 5880

Exposure control for phase shifting photolithographic masks

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2011-10-12 ABN Abandonment 2 View
2011-03-23 CTFR Final Rejection 34 View
2011-03-23 1449 List of References cited by applicant and considered by examiner 2 View
2011-03-23 SPEC.NE Specification-Amendment Not Entered 1 View
2011-03-17 DISQ Terminal Disclaimer review decision 1 View
2011-03-17 DISQ Terminal Disclaimer review decision 2 View
2011-02-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-02-14 SPEC Specification 1 View
2011-02-14 CLM Claims 5 View
2011-02-14 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2011-02-14 DIST Terminal Disclaimer Filed 2 View
2011-02-14 WFEE Fee Worksheet (SB06) 2 View
2011-02-14 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-02-14 WFEE Fee Worksheet (SB06) 1 View
2010-11-30 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2010-11-30 TRAN.LET Transmittal Letter 2 View
2010-11-30 FOR Foreign Reference 51 View
2010-11-30 WFEE Fee Worksheet (SB06) 2 View
2010-11-30 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-11-30 136A Authorization for Extension of Time all replies 3 View
2010-10-14 CTNF Non-Final Rejection 29 View
2010-10-14 892 List of references cited by examiner 1 View
2010-10-14 BIB Bibliographic Data Sheet 1 View
2010-10-14 SRNT Examiner's search strategy and results 7 View
2010-10-14 SRFW Search information including classification, databases and other search related notes 1 View
2010-10-14 1449 List of References cited by applicant and considered by examiner 2 View
2010-10-14 1449 List of References cited by applicant and considered by examiner 12 View
2010-10-14 1449 List of References cited by applicant and considered by examiner 7 View
2010-09-27 PETDEC Petition Decision 2 View
2010-02-25 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2010-02-25 TRAN.LET Transmittal Letter 2 View
2010-02-25 FOR Foreign Reference 1 View
2010-02-25 FOR Foreign Reference 16 View
2010-02-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-02-18 NTC.PUB Notice of Publication 1 View
2009-12-14 IDS Information Disclosure Statement (IDS) Form (SB08) 12 View
2009-12-14 TRAN.LET Transmittal Letter 2 View
2009-12-14 IDS Information Disclosure Statement (IDS) Form (SB08) 7 View
2009-12-14 TRAN.LET Transmittal Letter 2 View
2009-12-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-11-10 APP.FILE.REC Filing Receipt 3 View
2009-10-16 TRNA Transmittal of New Application 1 View
2009-10-16 ADS Application Data Sheet 3 View
2009-10-16 OATH Oath or Declaration filed 3 View
2009-10-16 SPEC Specification 13 View
2009-10-16 CLM Claims 5 View
2009-10-16 ABST Abstract 1 View
2009-10-16 ARTIFACT Artifact sheet indicating an item has been filed which cannot be scanned 1 View
2009-10-16 DRW Drawings-only black and white line drawings 6 View
2009-10-16 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2009-10-16 WFEE Fee Worksheet (SB06) 1 View
2009-10-16 PET.STATUS Petition for review/processing depending on status 2 View
2009-10-16 WFEE Fee Worksheet (SB06) 1 View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
12/589,033
Filed
2009-10-16
Pub. No.
US20100040965A1
Art Unit
1721