Mask frame assembly for thin film deposition and associated methods
View Patent ↗A mask frame assembly for thin film deposition including a frame having an opening portion and a support portion, and a mask having a deposition area in a position corresponding to the opening portion, wherein the mask includes a first layer including the deposition area and a peripheral portion disposed outside the deposition area and a second layer including a first surface and a second surface opposite to the first surface, at least a part of the first surface of the second layer faces the first layer and contacts the peripheral portion, and the second surface is welded to the support portion of the frame.
1. A mask frame assembly for thin film deposition, comprising:
a frame including an opening portion and a support portion; and
a mask including a deposition area in a position corresponding to the opening portion, wherein:
the mask includes:
a first layer including the deposition area and a peripheral portion disposed outside the deposition area, and
a second layer including a mask opening portion and a welding portion, the welding portion including two pairs of opposing sides having a first surface and a second surface opposite to the first surface,
at least a part of the first surface of the second layer faces the first layer and contacts the peripheral portion,
the second surface of the two pairs of opposing sides is welded to the support portion of the frame,
the mask opening portion includes an opening having a periphery, the periphery being defined by the two pairs of opposing sides, and the opening of the mask opening portion being coextensive with the opening portion of the frame, and
the first layer includes welding patterns corresponding to welding points on the welding portion of the second layer where the second layer is welded to the support portion of the frame.
2. The mask frame assembly for thin film deposition as claimed in claim 1 , wherein the mask includes at least two unit mask strips, each unit mask strip having opposing ends, and only the opposing ends of the at least two unit mask strips being integral with the support portion of the frame.
3. The mask frame assembly for thin film deposition as claimed in claim 1 , wherein the first layer and the second layer include different materials.
4. The mask frame assembly for thin film deposition as claimed in claim 3 , wherein the second layer includes a nickel-steel alloy.
5. The mask frame assembly for thin film deposition as claimed in claim 1 , wherein:
the second layer further includes first welding projections on the first surface,
the welding patterns have edges,
the first welding projections have centers, and
the centers of the first welding projections are spaced apart from the edges of the welding patterns.
6. The mask frame assembly for thin film deposition as claimed in claim 1 , wherein the second layer contacts the peripheral portion at a contact portion and the contact portion is disposed outside the deposition area.
7. The mask frame assembly for thin film deposition as claimed in claim 6 , wherein the second layer further includes second welding projections, the second welding projections have centers, and the centers of the second welding projections are spaced apart from the first layer.
8. The mask frame assembly for thin film deposition as claimed in claim 1 , wherein the first layer and the second layer are integral with each other.
9. The mask frame assembly for thin film deposition as claimed in claim 1 , wherein the mask further includes an adhesive layer disposed between the first layer and the second layer.
10. A method of manufacturing an organic light emitting display device, comprising:
forming a first electrode and a second electrode on a substrate such that the first electrode and the second electrode face each other; and
forming an organic layer between the first electrode and the second electrode, wherein forming the organic layer or the second electrode includes depositing the layer using a mask frame assembly for thin film deposition as claimed in claim 1 .