The present invention provides an X-ray tube that improves and stabilizes a withstanding voltage performance and thus ensures the reliability of a product. The present invention is an X-ray tube comprising a cathode for emitting electrons, an anode for emitting an X-ray which an irradiation of the electrons emitted from the cathode causes, and a glass tube for confining the cathode and the anode in a vacuum, wherein an inside surface of the glass tube is covered with a glass thin film having a melting point lower than that of a glass of the glass tube and particles adhered to the glass tube by the glass thin film.
1. An X-ray tube comprising:
a cathode for emitting electrons;
an anode for emitting an X-ray caused by irradiation of the electrons emitted from the cathode; and
a glass tube for containing the cathode and the anode in a vacuum,
wherein an inside surface of the glass tube is covered with a glass thin film having a melting point lower than that of a glass of the glass tube and particles adhered to the glass tube by the glass thin film, and
wherein a material for the particles is at least one selected from the group consisting of zircon, cordierite, aluminum titanate, alumina, mullite, silica, tin oxide ceramics and molten silica.
2. An X-ray tube according to claim 1 , wherein diameters of the particles are in a range of 1 to 20 μm.
3. An X-ray tube according to claim 1 , wherein an aspect ratio representing a flatness of the particles is 3 or less.
4. An X-ray tube according to claim 1 , wherein the particles are adhered to an inside surface of the glass tube between the anode and the cathode in a width of 2 mm or more.
5. An X-ray tube comprising:
a cathode configured to emit electrons;
an anode configured to emit an X-ray when irradiated with the electrons;
a glass tube containing the cathode and the anode in a vacuum;
a glass film formed on an inside surface of the glass tube; and
particles adhered to the glass tube by the glass film;
wherein the particles are adhered to the glass tube in a width of 2 mm or more between the anode and the cathode.
6. An X-ray tube according to claim 5 , wherein diameters of the particles are in a range of 1 to 20 μm.
7. An X-ray tube according to claim 5 , wherein an aspect ratio representing a flatness of the particles is 3 or less.
8. An X-ray tube according to claim 5 , wherein a material for the particles is at least one selected from the group consisting of zircon, cordierite, aluminum titanate, alumina, mullite, silica, tin oxide ceramics and molten silica.
9. An X-ray tube according to claim 5 , wherein the glass film has a melting point lower than a melting point of a glass of the glass tube.
10. An X-ray tube comprising:
a cathode configured to emit electrons;
an anode configured to emit an X-ray when irradiated with the electrons;
a glass tube containing the cathode and the anode in a vacuum;
a glass film formed on an inside surface of the glass tube; and
particles adhered to the glass tube by the glass film;
wherein a material for the particles is at least one selected from the group consisting of zircon, cordierite, aluminum titanate, alumina, mullite, silica, tin oxide ceramics and molten silica.
11. An X-ray tube according to claim 10 , wherein diameters of the particles are in a range of 1 to 20 μm.
12. An X-ray tube according to claim 10 , wherein an aspect ratio representing a flatness of the particles is 3 or less.
13. An X-ray tube according to claim 10 , wherein the glass film is formed from a glass frit having a melting point lower than a melting point of a glass of the glass tube.