Liquid droplet ejection apparatus, method for manufacturing electro-optic device, electro-optic device, and electronic equipment
View Patent ↗A liquid droplet ejection apparatus performs a drawing operation on a workpiece set on a set table by driving the ejection of a functional liquid droplet ejection head in a head unit while moving the head unit in a main scanning direction relative to the set table facing a drawing area by an X-axis table. The liquid droplet ejection apparatus includes a periodic flushing unit which is disposed on a main scan moving axis at a position offset from the drawing area towards the main scanning direction and which receives forcible ejection from the functional liquid droplet ejection head during non-drawing time and a pre-drawing flushing unit which is disposed adjacent to the set table and faces the drawing area and which receives forcible ejection from the functional liquid droplet ejection head performed immediately before starting the drawing operation.
1. A liquid droplet ejection apparatus for performing a drawing operation on a workpiece set on a set table by driving the ejection of a functional liquid droplet ejection head mounted in a head unit, the functional liquid droplet ejection head including an ejection nozzle, the head unit being moved in a drawing area in a main scanning direction relative to the set table located in the drawing area by main scan moving means, the apparatus comprising:
a first flushing unit mounted on a slider body of the main scan moving means, the first flushing unit receiving ejection from the ejection nozzle of the functional liquid droplet ejection head during non-drawing time and moving in the main scanning direction by moving the slider body in the main scanning direction,
a second flushing unit supported on a support base of the set table, the second flushing unit being disposed adjacent to the set table, the second flushing unit receiving ejection from the ejection nozzle of the functional liquid droplet ejection head, the ejection being performed immediately before starting the drawing operation on the workpiece; and
a maintenance means for maintaining the functional liquid droplet ejection head, the maintenance means being located at a position which is away from the drawing area towards a sub-scanning direction.
2. The apparatus according to claim 1 , wherein the maintenance means includes a suction unit for sucking the ejection nozzle of the functional liquid droplet ejection head to discharge functional liquid and a wiping unit for wiping a nozzle surface of the functional liquid droplet ejection head.