Thin-film transistor substrate and method of manufacturing the same
View Patent ↗A thin-film transistor substrate includes a gate line, a capacitor dielectric layer, a gate insulation layer, an active pattern, a data line, a protection layer, and a pixel electrode. The gate wiring including a gate electrode, a lower storage electrode, and a gate metal pad is disposed on a substrate. The capacitor dielectric layer is disposed on the lower storage electrode and the gate insulation layer is disposed on the substrate. The active pattern includes an active layer and a dummy active layer disposed on the gate insulation layer in a gate electrode region and a gate metal pad region, respectively. A portion of the upper storage electrode is disposed on the capacitor dielectric layer exposed through a first contact hole in the gate insulation layer.
1. A thin-film transistor (TFT) substrate, comprising:
a gate wiring disposed on a substrate, the gate wiring comprising a gate electrode, a lower storage electrode, and a gate metal pad;
a capacitor dielectric layer disposed on the lower storage electrode;
a gate insulation layer disposed on the substrate;
an active pattern including an active layer and a dummy active layer disposed on the gate insulation layer in a gate electrode region and a gate metal pad region, respectively;
a data wiring comprising a source electrode, a drain electrode, an upper storage electrode, and a data metal pad, the source and drain electrodes being disposed on the active layer such that the source and drain electrodes are spaced apart from each other, a portion of the upper storage electrode being disposed on the capacitor dielectric layer exposed through a first contact hole in the gate insulation layer, the data metal pad being directly connected to the gate metal pad through a second contact hole in the gate insulation layer and the dummy active layer;
a protection layer disposed on the substrate; and
a pixel electrode disposed on the protection layer, the pixel electrode being connected to the drain electrode.
2. The TFT substrate of claim 1 , wherein the capacitor dielectric layer comprises silicon oxide (SiO 2 ).
3. The TFT substrate of claim 2 , wherein the capacitor dielectric layer has a thickness of about 500 Å to about 1,000 Å.
4. The TFT substrate of claim 1 , further comprising an organic layer disposed between the protection layer and the pixel electrode.
5. The TFT substrate of claim 1 , further comprising a pad electrode formed from a same layer as the pixel electrode, the pad electrode being directly connected to the data metal pad.