Image sensor and method of manufacturing the same
View Patent ↗An image sensor and a method of manufacturing the same are disclosed. A passivation layer on an interlayer dielectric layer has different thicknesses for neighboring pixels. Consequently, a phase of light incident on a pixel is out of phase with light incident on an adjacent pixel before it reaches a photodiode. As a result, diffraction of the incident light results in destructive interference between the pixels. Thus, cross talk between adjacent pixels can be prevented.
1. A method of manufacturing an image sensor comprising:
forming an interlayer dielectric layer having a plurality of metal lines therein on a substrate having a photodiode therein;
forming a pre-passivation layer on the interlayer dielectric layer;
coating a photoresist on the pre-passivation layer;
patterning the photoresist in a checkerboard pattern by removing the photoresist from alternating pixels;
etching exposed areas of the pre-passivation layer using the photoresist pattern as a mask;
forming a passivation layer on the interlayer dielectric layer, the passivation layer having a first thickness over a first pixel, a second thickness over a second pixel adjacent to the first pixel, and a step between the first and second pixels;
forming a color filter layer on the passivation layer; and
forming microlenses on the color filter layer.
2. The method of claim 1 , wherein the color filter layer has a step or a curvature resulting from the step of the passivation layer, and the method further comprises planarizing the color filter layer prior to forming the microlenses.
3. The method of claim 1 , wherein a phase of light incident on a first pixel is out of phase with a phase of light incident on the adjacent pixels.
4. The method of claim 3 , wherein the exposed area is etched to a predetermined depth that results in a phase difference of about 180° with respect to the light incident on the masked pixels.
5. The method of claim 1 , comprising forming the pre-passivation layer by physical vapor deposition or chemical vapor deposition.
6. A method of manufacturing an image sensor comprising:
forming an interlayer dielectric layer having a plurality of metal lines therein on a substrate having a photodiode therein;
forming a pre-passivation layer on the interlayer dielectric layer;
coating a photoresist on the pre-passivation layer;
forming a checkerboard-shaped photoresist pattern from the photoresist by pattering and removing the photoresist from alternating pixels;
etching exposed areas of the pre-passivation layer using the photoresist pattern as a mask;
forming a passivation layer on the interlayer dielectric layer, the passivation layer having a first thickness over a first pixel, a second thickness over a second pixel adjacent to the first pixel, and a step between neighboring pixels;
forming a color filter layer on the passivation layer;
forming a planarization layer on the color filter layer; and
forming microlenses on the planarization layer.
7. The method of claim 6 , wherein the color filter layer has a uniform thickness.
8. The method of claim 6 , wherein a phase of light incident on a first pixel is out of phase with a phase of light incident on the adjacent pixels.
9. The method of claim 6 , wherein the exposed areas are etched to a predetermined depth that results in a phase difference of 180° with respect to the light incident on the masked pixels and the light incident on the second pixel.
10. The method of claim 6 , wherein the exposed areas of the pre-passivation layer are etched by dry etching or plasma etching.