Thermal bend actuator comprising bilayered passive beam
View Patent ↗A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam is comprised of first and second layers, and the second layer is sandwiched between the first layer and the active beam. The second layer is relatively more thermally insulating than the first layer.
1. A thermal bend actuator comprising:
an active beam for connection to drive circuitry; and
a passive beam mechanically cooperating with the active beam, such that when a current is passed through the active beam, the active beam expands relative to the passive beam, resulting in bending of the actuator,
wherein the passive beam is comprised of first and second layers, said second layer being sandwiched between the first layer and the active beam, wherein said second layer is relatively more thermally insulating than said first layer.
2. The thermal bend actuator of claim 1 , wherein said second layer is comprised of silicon dioxide.
3. The thermal bend actuator of claim 1 , wherein said active beam is connected to said drive circuitry via a pair of electrical contacts positioned at one end of said actuator.
4. The thermal bend actuator of claim 1 , wherein the active beam is fused to the passive beam by a deposition process.
5. The thermal bend actuator of claim 1 , wherein the active beam is comprised of a vanadium-aluminium alloy.
6. An inkjet nozzle assembly comprising:
a nozzle chamber having a nozzle opening and an ink inlet; and
a thermal bend actuator for ejecting ink through the nozzle opening, said actuator comprising:
an active beam for connection to drive circuitry; and
a passive beam mechanically cooperating with the active beam, such that when a current is passed through the active beam, the active beam expands relative to the passive beam, resulting in bending of the actuator,
wherein the passive beam is comprised of first and second layers, said second layer being sandwiched between the first layer and the active beam, wherein said second layer is relatively more thermally insulating than said first layer.
7. The inkjet nozzle assembly of claim 6 , wherein the nozzle chamber comprises a floor and a roof having a moving portion, whereby actuation of said actuator moves said moving portion towards said floor.
8. The inkjet nozzle assembly of claim 7 , wherein the active beam is disposed on an upper surface of said passive beam relative to the floor of the nozzle chamber.
9. The inkjet nozzle assembly of claim 7 , wherein the nozzle opening is defined in the moving portion, such that the nozzle opening is moveable relative to the floor.
10. The inkjet nozzle assembly of claim 7 , wherein the actuator is moveable relative to the nozzle opening.
11. The inkjet nozzle assembly of claim 6 , wherein the moving portion comprises the actuator.
12. An inkjet printhead comprising a plurality of nozzle assemblies, each nozzle assembly comprising:
a nozzle chamber having a nozzle opening and an ink inlet; and
a thermal bend actuator for ejecting ink through the nozzle opening, said actuator comprising:
an active beam connected to drive circuitry; and
a passive beam mechanically cooperating with the active beam, such that when a current is passed through the active beam, the active beam expands relative to the passive beam, resulting in bending of the actuator,
wherein the passive beam is comprised of first and second layers, said second layer being sandwiched between the first layer and the active beam, wherein said second layer is relatively more thermally insulating than said first layer.