Programmable micro-electromechanical microshutter array
View Patent ↗A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. A control circuit provides a separately-controlled and independent voltage that is applied to each of the linear microshutter elements. A controller sets the respective voltages applied to each of the linear microshutter elements.
1. A microshutter array comprising a frame having a
single opening that includes a light transmissive portion;
a plurality of linear microshutter elements extending across the light transmissive portion and in parallel to each other, each microshutter element comprises a flat blade extended in a length direction across the light transmissive portion and first and second torsion arms connected to the frame and extending outwards from each side of the blade in the length direction;
a control circuit for producing a separately-controlled and independent voltage that is applied to each of the linear micro shutter elements; and
a controller for setting the respective voltages applied to each of the linear microshutter elements.
2. The microshutter array of claim 1 , wherein the light transmissive portion is a transparent material.
3. The microshutter array of claim 1 , wherein the light transmissive portion is hollow.
4. The microshutter array of claim 1 , further comprising lenslets to direct light between the microshutter elements.
5. The microshutter array of claim 1 , wherein the flat blade allows light transmission through the light transmissive portion in an unactuated position and blocks light transmission when actuated.
6. The microshutter array of claim 1 , wherein the control circuit comprises:
a first gate for switching the microshutter array to a first state;
a voltage divider circuit for providing multiple voltages in order to position the blades of the microshutter elements at various angles; and
a second gate for switching the microshutter array to a second state.
7. A system comprising:
a microshutter array comprising a frame having a single opening that includes a light transmissive portion;
a plurality of linear microshutter elements extending across the light transmissive portion and in parallel to each other, each microshutter element comprises a flat blade extended in a length direction across the light transmissive portion and first and second torsion arms connected to the frame and extending outwards from each side of the blade in the length direction;
a control circuit for producing a separately-controlled and independent voltage that is applied to each of the linear microshutter elements;
a controller for setting the respective voltages applied to each of the linear microshutter elements; and
a storage element for storing different settings for the linear microshutter elements.
8. The system of claim 7 , wherein the light transmissive portion is a transparent material.
9. The system of claim 7 , wherein the light transmissive portion is hollow.
10. The system of claim 7 , further comprising lenslets to direct light between the microshutter elements.
11. The system of claim 7 , wherein the flat blade allows light transmission through the light transmissive portion in an unactuated position and blocks light transmission when actuated.
12. The system of claim 7 , wherein the control circuit comprises:
a first gate for switching the microshutter array to a first state;
a voltage divider circuit for providing multiple voltages to position the blades of the microshutter elements at various angles; and
a second gate for switching the microshutter array to a second state.
13. An imaging apparatus, comprising:
an imaging sensor comprising an array of pixels arranged in rows; and
a microshutter array positioned over the array of pixels, wherein the microshutter array comprises:
a frame having a single opening that includes a light transmissive portion;
a plurality of linear microshutter elements extending across the light transmissive portion and in parallel to each other, each microshutter element comprises a flat blade extended in a length direction across the light transmissive portion and first and second torsion arms connected to the frame and extending outwards from each side of the blade in the length direction;
a control circuit for producing a separately-controlled and independent voltage that is applied to each of the linear microshutter elements; and
a controller for setting the respective voltages applied to each of the linear microshutter elements.
14. The imaging apparatus of claim 13 , wherein the flat blade allows light transmission through the light transmissive portion in an unactuated position and blocks light transmission when actuated.
15. The imaging apparatus of claim 13 , further comprising lenslets to direct light between the microshutter elements.
16. The imaging apparatus of claim 13 , further comprising a lens to direct light to the microshutter array.
17. The imaging apparatus of claim 13 , wherein the control circuit comprises:
a first gate for switching the microshutter array to a first state;
a voltage divider circuit for providing multiple voltages in order to position the blades of the microshutter elements at various angles; and
a second gate for switching the microshutter array to a second state.