Acoustic boundary wave device and electronic apparatus using the same
View Patent ↗An acoustic boundary wave device includes a piezoelectric body, an IDT layer formed on the piezoelectric body, a pad electrode layer formed on the piezoelectric body and connected to the IDT layer, a first dielectric layer formed on the piezoelectric body and covering at least a part of the IDT electrode layer, and a second dielectric layer formed on the piezoelectric body, covering the first dielectric layer, and having an opening through which at least a part of a top face of the pad electrode layer is exposed. The metal forming lateral faces of the pad electrode layer diffuses more readily into the first dielectric layer than into the second dielectric layer. The second dielectric layer covers the lateral faces of the pad electrode layer and prevents the first dielectric layer from touching the lateral faces of the pad electrode layer.
1. An acoustic boundary wave device comprising:
a piezoelectric body;
an interdigital transducer electrode layer provided on the piezoelectric body;
a pad electrode layer provided on the piezoelectric body and electrically connected to the interdigital transducer electrode layer;
a first dielectric layer provided on the piezoelectric body to cover at least a part of the interdigital transducer electrode layer; and
a second dielectric layer provided on the piezoelectric body to cover the first dielectric layer, and provided with an opening through which at least a part of a top face of the pad electrode layer is exposed,
wherein diffusivity of a metal forming a lateral face of the pad electrode layer into the first dielectric layer is greater than that into the second dielectric layer,
wherein the second dielectric layer is provided to cover lateral faces of the pad electrode layer so as to prevent the first dielectric layer from touching the lateral faces of the pad electrode layer, and
wherein a nitride-oxide film is formed on the second dielectric layer.
2. The acoustic boundary wave device according to claim 1 further comprising a diffusion protective layer provided on a top face of the interdigital transducer electrode layer.
3. The acoustic boundary wave device according to claim 2 , wherein a thickness of the interdigital transducer electrode layer is smaller than that of the pad electrode layer.
4. The acoustic boundary wave device according to claim 1 , wherein moisture absorption of the second dielectric layer is lower than that of the first dielectric layer.
5. The acoustic boundary wave device according to claim 1 , wherein the lateral faces of the pad electrode layer is chiefly made of at least one metal selected from a group consisting of copper, gold, and silver,
wherein the first dielectric layer is made of silicon dioxide, and
wherein the second dielectric layer is made of at least one material selected from a group consisting of silicon nitride, aluminum nitride, aluminum oxide, and silicon.
6. The acoustic boundary wave device according to claim 1 , wherein the second dielectric layer is made of at least one of silicon nitride and aluminum nitride.
7. An electronic apparatus comprising:
a filter including an acoustic boundary wave device;
a semiconductor integrated circuit connected to the filter; and
a reproducing section connected to the semiconductor integrated circuit, wherein the acoustic boundary wave device includes:
a piezoelectric body;
an interdigital transducer electrode layer provided on the piezoelectric body;
a pad electrode layer provided on the piezoelectric body and electrically connected to the interdigital transducer layer;
a first dielectric layer provided on the piezoelectric body to cover at least a part of the interdigital transducer electrode layer; and
a second dielectric layer provided on the piezoelectric body to cover the first dielectric layer, and provided with an opening through which at least a part of a top face of the pad electrode layer is exposed,
wherein a diffusivity of metal forming a lateral face of the pad electrode layer into the first dielectric layer is greater than that into the second dielectric layer,
wherein the second dielectric layer is provided to cover lateral faces of the pad electrode layer so as to prevent the first dielectric layer from touching the lateral faces of the pad electrode layer, and
wherein a nitride-oxide film is formed on the second dielectric layer.