Thin film transistor and display device
View Patent ↗The present invention provides a thin film transistor realizing improved reliability by suppressing deterioration in electric characteristics. The thin film transistor includes an oxide semiconductor film forming a channel; a gate electrode disposed on one side of the oxide semiconductor film via a gate insulating film; and a pair of electrodes formed as a source electrode and a drain electrode in contact with the oxide semiconductor film and obtained by stacking at least first and second metal layers in order from the side of the oxide semiconductor film The first metal layer is made of a metal having ionization energy equal to or higher than molybdenum (Mo), a metal having oxygen barrier property, or a nitride or a silicon nitride of the metal having oxygen barrier property.
1. A thin film transistor comprising:
a substrate;
a gate insulating layer on the substrate;
a gate electrode between the substrate and the gate insulating layer;
an oxide semiconductor film on the gate insulating film, the oxide semiconductor film capable of having a channel formed therein;
a channel protection film formed on a portion of the oxide semiconductor film; and
a pair of electrodes formed as a source electrode and a drain electrode which are in part in contact with the oxide semiconductor film but in part spaced from the oxide semiconductor film due to the channel protection film, the electrodes comprising at least first and second metal layers stacked in that order proceeding from the oxide semiconductor film,
wherein,
the first metal layer is made of a metal having an ionization energy equal to or higher than that of molybdenum (Mo).
2. The thin film transistor according to claim 1 , wherein the first metal layer is made of molybdenum.
3. The thin film transistor according to claim 2 , wherein each of the pair of electrodes is obtained by further stacking a third metal layer on the second metal layer.
4. The thin film transistor according to claim 3 , wherein the second metal layer is made of aluminum (Al), and the third metal layer is made of titanium (Ti).
5. The thin film transistor according to claim 1 , further comprising a protection film on the channel of the oxide semiconductor film.
6. The thin film transistor of claim 1 , wherein the first metal is selected from the group consisting of mercury, silver, platinum and gold.
7. A display device comprising a display element and a thin film transistor for driving the display element,
wherein the thin film transistor includes:
a substrate;
a gate insulating layer on the substrate;
a gate electrode between the substrate and the gate insulating layer;
an oxide semiconductor film on the gate insulating film, the oxide semiconductor film capable of having a channel formed therein;
a channel protection film formed on a portion of the oxide semiconductor film; and
a pair of electrodes formed as a source electrode and a drain electrode which are in part in contact with the oxide semiconductor film but in part spaced from the oxide semiconductor film due to the channel protection film, the electrodes comprising at least first and second metal layers stacked in that order proceeding from the oxide semiconductor film, the first metal layer being made of a metal having (a) an ionization energy equal to or higher than that of molybdenum (Mo).
8. The display device of claim 7 , wherein the first metal is selected from the group consisting of mercury, silver, platinum and gold.
9. The display device of claim 7 , wherein the first metal is molybdenum.