Method of manufacturing a magnetic recording medium
View Patent ↗A method of manufacturing a magnetic recording medium, includes, in the order recited, the steps of forming a mask protective film composed of carbon on a magnetic layer; forming a resist with a predetermined pattern on the mask protective film; forming a protective mask by etching the mask protective film using the resist as a mask; forming protrusions and recesses on a magnetic layer by etching the magnetic layer using the resist and the protective mask as masks; removing the protective mask, including removing the mask protective film comprised of carbon, using ultraviolet light with a principal wavelength not longer than 340 nm; and forming a protective layer on the magnetic layer having the protrusions and recesses formed thereon.
1. A method of manufacturing a magnetic recording medium, comprising, in the order recited, the steps of:
(a) forming a mask protective film comprised of carbon on a magnetic layer;
(b) forming a resist with a predetermined pattern on the mask protective film;
(c) forming a protective mask by etching the mask protective film using the resist as a mask;
(d) forming protrusions and recesses on a magnetic layer by etching the magnetic layer using the resist and the protective mask as masks;
(e) removing the protective mask using ultraviolet light with a principal wavelength not longer than 340 nm to evaporate the protective mask; and
(f) forming a protective layer on the magnetic layer having the protrusions and recesses formed thereon;
wherein the magnetic recording medium is not exposed to the atmosphere during a period of time at least from step (e) removing the protective mask to step (f) forming a protective layer.
2. The method of manufacturing a magnetic recording medium according to claim 1 , wherein a procedure from the step of removing the protective mask to the step of forming the protective layer is carried out in an environment of an inert gas.
3. The method of manufacturing a magnetic recording medium according to claim 2 , wherein the procedure from the step of removing the protective mask to the step of forming the protective layer is carried out in an environment of an inert gas having a reduced pressure of not higher than 1,000 Pa.
4. The method of manufacturing a magnetic recording medium according to claim 1 , wherein a procedure from the step of removing the protective mask to the step of forming the protective layer is carried out in an environment having a reduced pressure of not higher than 1,000 Pa.
5. The method of manufacturing a magnetic recording medium according to claim 1 , wherein a procedure from the step of removing the protective mask to the step of forming the protective layer is carried out in an environment of a reducing gas.
6. The method of manufacturing a magnetic recording medium according to claim 5 , wherein the procedure from the step of removing the protective mask to the step of forming the protective layer is carried out in an environment of a reducing gas having a reduced pressure of not higher than 1,000 Pa.
7. A method of manufacturing a magnetic recording medium, comprising the steps of, in the order recited:
(a) forming a mask protective film comprised of carbon on a magnetic layer;
(b) forming a resist with a predetermined pattern on the mask protective film;
(c) forming a protective mask by etching the mask protective film using the resist as a mask;
(d) forming protrusions and recesses on a magnetic layer by etching the magnetic layer using the resist and the protective mask as masks;
(e) removing the protective mask using ultraviolet light with a principal wavelength not longer than 340 nm to evaporate the protective mask; and
(f) forming a protective layer on the magnetic layer having the protrusions and recesses formed thereon,
wherein oxidation of the magnetic layer is prevented by conducting the method in an environment having a reduced pressure that is not higher than 1,000 Pa, at least from step (e) removing the protective mask to step (f) forming the protective layer and the magnetic recording medium is not exposed to atmosphere during at least that period of time.
8. The method of manufacturing a magnetic recording medium according to claim 7 , wherein said environment is one of an inert gas or a reducing gas having said reduced pressure.
9. The method of manufacturing a magnetic recording medium according to claim 8 , wherein said environment is an inert gas and the inert gas is argon or nitrogen.
10. The method of manufacturing a magnetic recording medium according to claim 8 , wherein said environment is a reducing gas and the reducing gas is hydrogen.