Nitride semiconductor light emitting device and method of manufacturing the same
View Patent ↗A nitride semiconductor light emitting device, and a method of manufacturing the same are disclosed. The nitride semiconductor light emitting device includes a substrate, an n-type nitride semiconductor layer disposed on the substrate and including a plurality of V-shaped pits in a top surface thereof, an active layer disposed on the n-type nitride semiconductor layer and including depressions conforming to the shape of the plurality of V-shaped pits, and a p-type nitride semiconductor layer disposed on the active layer and including a plurality of protrusions on a top surface thereof. Since the plurality of V-shaped pits are formed in the top surface of the n-type nitride semiconductor layer, the protrusions can be formed on the p-type nitride semiconductor layer as an in-situ process. Accordingly, the resistance to ESD, and light extraction efficiency are enhanced.
1. A nitride semiconductor light emitting device comprising:
a substrate;
an n-type nitride semiconductor layer disposed on the substrate and including a plurality of V-shaped pits in a top surface thereof;
an active layer disposed on the n-type nitride semiconductor layer and including depressions conforming to the shape of the plurality of V-shaped pits; and
a p-type nitride semiconductor layer disposed on the active layer and including a plurality of protrusions on a top surface thereof,
wherein the plurality of protrusions correspond to the plurality of V-shaped pits to overlap in a vertical direction, respectively.
2. The nitride semiconductor light emitting device of claim 1 , wherein the plurality of protrusions have widths greater than the plurality of V-shaped pits.
3. The nitride semiconductor light emitting device of claim 1 , further comprising an n-type nitride-based superlattice layer disposed between the n-type nitride semiconductor layer and the active layer and including depressions conforming to the shape of the plurality of V-shaped pits.
4. The nitride semiconductor light emitting device of claim 1 , further comprising a p-type nitride-based superlattice layer disposed between the active layer and the p-type nitride semiconductor layer and including depressions conforming to the shape of the plurality of V-shaped pits.
5. The nitride semiconductor light emitting device of claim 1 , further comprising:
an n-type nitride-based superlattice layer disposed between the n-type nitride semiconductor layer and the active layer and including depressions conforming to the shape of the plurality of V-shaped pits; and
a p-type nitride-based superlattice layer disposed between the active layer and the p-type nitride semiconductor layer and including depressions conforming to the shape of the plurality of V-shaped pits.