Method of manufacturing electronic apparatus including plastic substrate, electronic apparatus manufactured using the method, and apparatus for use in the method
View Patent ↗A method of manufacturing an electronic apparatus including a plastic substrate, which can facilitate in separating the electronic apparatus including the plastic substrate from a stage, an electronic apparatus manufactured using the method, and an apparatus including the stage for use in the method. The method includes: preparing a stage on which a plurality of island-shaped separation lubricators are arranged; disposing the plastic substrate on the stage; forming a device on the plastic substrate; and separating the plastic substrate from the stage.
1. A method of manufacturing an electronic apparatus comprising a plastic substrate, the method comprising:
preparing a stage with a plurality of island-shaped separation lubricators and an anti-peeling member, wherein the preparing of the stage comprises forming the plurality of island-shaped separation lubricators and the anti-peeling member on the stage, the plurality of island-shaped separation lubricators being in a first region on the stage, the anti-peeling member being outside the first region of the island-shaped separation lubricators;
disposing the plastic substrate on the stage with the plurality of island-shaped separation lubricators therebetween;
forming an electronic device on the plastic substrate; and
separating the plastic substrate from the stage, wherein the separating of the plastic substrate comprises separating the plastic substrate from the stage by cutting the plastic substrate along a cutting line that is located between the anti-peeling member and the island-shaped separation lubricators.
2. The method of claim 1 , wherein the preparing of the stage comprises forming the plurality of island-shaped separation lubricators on the stage.
3. The method of claim 1 , wherein an adhesive force between the island-shaped separation lubricators and the stage is greater than an adhesive force between the island-shaped separation lubricators and the plastic substrate.
4. The method of claim 1 , wherein an adhesive force between the plastic substrate and the island-shaped separation lubricators is less than an adhesive force between the plastic substrate and the stage.
5. The method of claim 1 , wherein the stage comprises a glass material.
6. The method of claim 1 , wherein the island-shaped separation lubricators comprises a silicon oxide and/or silicon nitride material.
7. The method of claim 1 , wherein the plastic substrate comprises a polyimide material.
8. The method of claim 1 , wherein the disposing of the plastic substrate comprises forming the plastic substrate on the stage by utilizing slit coating.
9. The method of claim 1 , wherein the anti-peeling member surrounds the first region of the island-shaped separation lubricators.
10. The method of claim 9 , wherein the anti-peeling member comprises a plurality of anti-peeling units spaced apart from one another.
11. The method of claim 1 , wherein an adhesive force between the anti-peeling member and the plastic substrate is greater than an adhesive force between the stage and the plastic substrate.
12. The method of claim 1 , wherein the anti-peeling member comprises a material selected from the group consisting of aluminum oxides, gallium oxides, boron oxides, magnesium oxides, calcium oxides, strontium oxides, and combinations thereof.
13. The method of claim 1 , wherein the anti-peeling member has a band gap between about 4 and about 9 eV.
14. The method of claim 1 , wherein the preparing of the stage comprises:
forming the plurality of island-shaped separation lubricators in the first region on the stage; and
forming the anti-peeling member outside the first region of the island-shaped separation lubricators so that the anti-peeling member surrounds the first region of the island-shaped separation lubricators.