Photoresist composition and method of fabricating thin film transistor substrate
View Patent ↗The present invention relates to a photoresist composition for digital exposure and a method of fabricating a thin film transistor substrate. The photoresist composition for digital exposure includes a binder resin including a novolak resin and a compound represented by the chemical formula (1), a photosensitizer including a diazide-based compound, and a solvent: wherein R 1 -R 9 each include a hydrogen atom, an alkyl group, or a benzyl group, a is an integer from 0 to 10, b is an integer from 0 to 100, and c is an integer from 0 to 10.
1. A photoresist composition for digital exposure, comprising:
a binder resin comprising a novolak resin and a compound represented by chemical formula (1);
a photosensitizer comprising a diazide-based compound; and
a solvent:
wherein R 1 -R 9 each comprise a hydrogen atom, an alkyl group, or a benzyl group, a is an integer from 0 to 10, b is an integer from 1 to 100, and c is an integer from 1 to 10.
2. The photoresist composition of claim 1 , wherein the photoresist composition comprises 5 to 30 weight % of the binder resin, the photoresist composition comprises 2 to 10 weight % of the photosensitizer, and the remainder of the photoresist composition comprises the solvent, based on a total weight of the photoresist composition.
3. The photoresist composition of claim 1 , wherein the novolak resin has a weight average molecular weight ranging from 2,000 to 20,000, and the compound represented by the chemical formula (1) has a weight average molecular weight ranging from 2,000 to 20,000.
4. The photoresist composition of claim 3 , wherein the novolak resin and the compound represented by the chemical formula (1) are mixed in a mixing ratio by weight ranging from 1:99 to 80:20.
5. The photoresist composition of claim 3 , wherein the novolak resin comprises a meta-cresol novolak component and a para-cresol novolak component, the meta-cresol novolak component and the para-cresol component comprising a mixing ratio by weight ranging from 30:70 to 70:30.
6. The photoresist composition of claim 1 , wherein the photosensitizer further comprises a compound represented by chemical formula (2):
wherein R 1 -R 4 each comprise 2-diazo-1-naphthol-5-sulfonyl, a hydrogen atom, or an alkyl group, and R 5 -R 8 each comprise a hydrogen atom, an alkyl group, or a benzyl group.
7. The photoresist composition of claim 6 , wherein the diazide-based compound and the compound represented by chemical formula (2) are mixed in a mixing ratio by weight ranging from about 1:99 to 80:20.
8. The photoresist composition of claim 7 , wherein the diazide-based compound is at least one selected from the group consisting of 2,3,4-trihydroxybenzophenone-1,2-naphthoquinone diazide-5-sulfonate and 2,3,4,4′-tetrahydroxybenzophenone-1,2-naphthoquinone diazide-5-sulfonate.
9. The photoresist composition of claim 1 , wherein the solvent is at least one selected from the group consisting of propyleneglycol monoethylether acetate (PGMEA), ethyl lactate (EL), ethyl cellosolve acetate (ECA), 2-methoxyethylacetate, γ-butyrolactone (GBL), methyl methoxy propionate (MMP), ethyl-β-ethoxypropionate (EEP), propylene glycol monomethyl ether (PGME), n propyl acetate (nPAC), and n-butyl acetate (nBA).
10. The photoresist composition of claim 1 , further comprising at least one selected from the group consisting of a coloring agent, a dying agent, a streation preventing agent, a plasticizer, an adhesion promoting agent, a photospeed enhancer, and a surfactant.