Microfabricated fluidic circuit elements and applications
A microfabricated fluidic unidirectional valve includes a microfabricated elastomer material having a flow through channel. The microfabricated fluidic unidirectional valve also includes an elastomer flap attached to the elastomer material in the flow through channel. The elastomer flap forms a seal in the flow through channel to prevent fluid from flowing in a first direction through the flow through channel and to allow fluid flow in a second direction through the flow through channel.
1. A microfabricated fluidic unidirectional valve comprising:
a first layer of microfabricated elastomer material, a second layer of microfabricated elastomer material, and a flow through channel disposed between the first layer of microfabricated elastomer material and the second layer of microfabricated elastomer material; and
an elastomer flap attached to the first layer of microfabricated elastomer material, wherein the elastomer flap extends substantially normally to the first layer of microfabricated elastomer material;
wherein the elastomer flap forms a seal in the flow through channel to prevent fluid from flowing in a first direction through the flow through channel, and to allow fluid to flow in a second direction through the flow through channel.
2. The microfabricated fluidic unidirectional valve of claim 1 wherein the second layer of elastomer material comprises a stopper in the flow through channel that forms a seal with the elastomer flap when fluid flows in the first direction.
3. The microfabricated fluidic unidirectional valve of claim 2 wherein a distal end of the elastomer flap forms the seal with the stopper when fluid flows in the first direction.
4. The microfabricated fluidic unidirectional valve of claim 2 wherein the stopper extends into the flow through channel, thereby reducing a width of the flow through channel adjacent to the stopper.
5. The microfabricated fluidic unidirectional valve of claim 2 wherein the stopper extends into the flow through channel by a distance between 1 μm and 1000 μm.
6. The microfabricated fluidic unidirectional valve of claim 1 wherein the flow through channel is characterized by a thickness between 5 μm and 1000 μm.
7. The microfabricated fluidic unidirectional valve of claim 1 wherein the elastomer flap is characterized by a width between 5 μm and 1000 μm.
8. The microfabricated fluidic unidirectional valve of claim 1 wherein the elastomer flap is characterized by a thickness between 1 μm and 200 μm.