Semiconductor integrated circuit device
View Patent ↗In semiconductor integrated circuit devices for vehicle use or the like, in general, an aluminum pad on a semiconductor chip and an external device are coupled to each other by wire bonding or the like using a gold wire and the like for the convenience of mounting. Such a semiconductor integrated circuit device, however, causes a connection failure due to the interaction between aluminum and gold in use for a long time at a relatively high temperature (about 150 degrees C.). The invention of the present application provides a semiconductor integrated circuit device (semiconductor device or electron circuit device) which includes a semiconductor chip as a part of the device, an electrolytic gold plated surface film (gold-based metal plated film) provided over an aluminum-based bonding pad on a semiconductor chip via a barrier metal film, and a gold bonding wire (gold-based bonding wire) for interconnection between the plated surface film and an external lead provided over a wiring board or the like (wiring substrate).
1. A semiconductor integrated circuit device, comprising:
(a) an aluminum-based or copper-based pad electrode provided over a device surface of a semiconductor chip;
(b) a barrier metal film provided over the pad electrode;
(c) a surface metal film provided over the barrier metal film and including gold as a principal component;
(d) a bonding ball or a bonding wire bonded to the surface metal film and including gold or copper as a principal component; and
(e) a seed metal film provided between the barrier metal film and the surface metal film,
wherein the seed metal film includes palladium as a principal component.
2. The semiconductor integrated circuit device according to claim 1 , wherein a thickness of the surface metal film is larger than that of the barrier metal film.
3. The semiconductor integrated circuit device according to claim 1 , wherein the surface metal film is formed by electrolytic plating or sputtering.
4. The semiconductor integrated circuit device according to claim 1 , wherein the surface metal film is formed by electrolytic plating.
5. The semiconductor integrated circuit device according to claim 1 , wherein an area of the surface metal film is larger than that of an opening of an insulating film over the pad electrode.
6. The semiconductor integrated circuit device according to claim 5 , wherein an area of the pad electrode is larger than that of the surface metal film.
7. The semiconductor integrated circuit device according to claim 1 , wherein an opening of an insulating film over the pad electrode is located within the surface metal film in plan view.
8. The semiconductor integrated circuit device according to claim 7 , wherein the surface metal film is located within the pad electrode in the plan view.
9. The semiconductor integrated circuit device according to claim 1 , wherein the surface metal film extends up to an area without the pad electrode.
10. The semiconductor integrated circuit device according to claim 1 , wherein the bonding ball is a ball portion of a bonding wire.
11. The semiconductor integrated circuit device according to claim 1 , wherein the bonding ball is comprised of a member including gold as a principal component.
12. The semiconductor integrated circuit device according to claim 1 , wherein the bonding ball is comprised of a member including copper as a principal component.
13. The semiconductor integrated circuit device according to claim 1 , wherein the pad electrode is an aluminum-based pad electrode.
14. The semiconductor integrated circuit device according to claim 1 , wherein the barrier metal film includes titanium as a principal component.
15. The semiconductor integrated circuit device according to claim 1 , wherein the barrier metal film includes one selected from the group comprising titanium, chrome, titanium nitride, and tungsten nitride as a principal component.
16. The semiconductor integrated circuit device according to claim 1 , wherein the pad electrode has a substantially square shape in plan view.
17. The semiconductor integrated circuit device according to claim 1 , wherein the pad electrode has a substantially rectangular shape in plan view.
18. The semiconductor integrated circuit device according to claim 1 , further comprising:
(f) an inorganic final passivation film having an opening where the barrier metal film is provided over the pad electrode,
wherein the pad electrode is an aluminum-based pad electrode, and
the barrier metal film includes titanium as a principal component.
19. A semiconductor integrated circuit device, comprising:
(a) an aluminum-based or copper-based pad electrode provided over a device surface of a semiconductor chip;
(b) an inorganic final passivation film having an opening;
(c) a barrier metal film provided over the pad electrode through the opening;
(d) a seed metal film provided over the barrier metal film and including palladium as a principal component; and
(e) a bonding ball or a bonding wire provided over the seed metal film and including gold or copper as a principal component.
20. The semiconductor integrated circuit device according to claim 19 , wherein
the bonding ball is a ball portion of a bonding wire and is comprised of a member including gold as a principal component, and
the pad electrode is a copper-based pad electrode.
21. The semiconductor integrated circuit device according to claim 19 , wherein the barrier metal film includes one selected from the group comprising titanium, chrome, titanium nitride, and tungsten nitride as a principal component.