Multiple stack deposition for epitaxial lift off
View Patent ↗Embodiments of the invention are provided for a thin film stack containing a plurality of epitaxial stacks disposed on a substrate and a method for forming such a thin film stack. In one embodiment, the epitaxial stack contains a first sacrificial layer disposed over the substrate, a first epitaxial film disposed over the first sacrificial layer, a second sacrificial layer disposed over the first epitaxial film, and a second epitaxial film disposed over the second sacrificial layer. The thin film stack may further contain additional epitaxial films disposed over sacrificial layers. Generally, the epitaxial films contain gallium arsenide alloys and the sacrificial layers contain aluminum arsenide alloys. Methods provide the removal of the epitaxial films from the substrate by etching away the sacrificial layers during an epitaxial lift off (ELO) process. The epitaxial films are useful as photovoltaic cells, laser diodes, or other devices or materials.
1. A method for forming thin film stacks on a substrate surface, comprising:
depositing a first sacrificial layer over a substrate, wherein the substrate is positioned under a first showerhead for deposition of the first sacrificial layer;
depositing a first epitaxial film over the first sacrificial layer, wherein the substrate is positioned under a second showerhead for deposition of the first epitaxial film;
depositing a second sacrificial layer over the first epitaxial film;
depositing a second epitaxial film over the second sacrificial layer;
forming additional epitaxial stacks on the substrate and over the second epitaxial stack, wherein each additional epitaxial stack comprises an epitaxial film deposited over a sacrificial layer and each sacrificial layer is deposited on the epitaxial film of the previously deposited epitaxial stack; and
separating the first and second epitaxial films from the substrate during an epitaxial lift off process by:
etching away the second sacrificial layer while removing the second epitaxial film; and
etching away the first sacrificial layer while removing the first epitaxial film.
2. The method of claim 1 , wherein the first and second epitaxial films are simultaneously separated from the substrate.
3. The method of claim 1 , wherein etching away the first sacrificial layer while removing the first epitaxial film is subsequent to etching away the second sacrificial layer while removing the second epitaxial film.
4. The method of claim 1 , further comprising:
depositing a third sacrificial layer over the second epitaxial film; and
depositing a third epitaxial film over the third sacrificial layer prior to the epitaxial lift off process.
5. The method of claim 1 , wherein the substrate comprises gallium arsenide, alloys thereof, dopants thereof, or derivatives thereof.
6. The method of claim 1 , wherein the substrate is disposed on a rotatable platen or a rotatable drum within a processing chamber.
7. The method of claim 6 , wherein a plurality of substrates is disposed on the rotatable platen or the rotatable drum within the processing chamber, and the sacrificial layers and the epitaxial films are deposited on each of the substrates.
8. The method of claim 6 , wherein the substrate is positioned under a first showerhead to deposit the first sacrificial layer and the substrate is subsequently rotated and positioned under a second showerhead to deposit the first epitaxial film within the processing chamber.
9. The method of claim 6 , wherein each epitaxial film comprises multiple layers, and each layer is deposited from different regions or from different showerheads within the processing chamber.
10. The method of claim 6 , wherein each epitaxial film independently comprises a gallium arsenide buffer layer, a first aluminum gallium arsenide passivation layer, a gallium arsenide active layer, and a second aluminum gallium arsenide passivation layer.
11. The method of claim 1 , wherein each of the first and second epitaxial films independently comprises a layer comprising gallium arsenide and another layer comprising aluminum gallium arsenide.
12. The method of claim 1 , wherein each of the first and second epitaxial films independently comprises a material selected from the group consisting of gallium arsenide, aluminum gallium arsenide, indium gallium phosphide, alloys thereof, derivatives thereof, and combinations thereof.
13. The method of claim 1 , wherein each of the first and second sacrificial layers independently comprises a material selected from the group consisting of aluminum arsenide, alloys thereof, derivatives thereof, and combinations thereof.
14. The method of claim 13 , wherein each of the first and second sacrificial layers independently has a thickness of about 20 nm or less.
15. The method of claim 14 , wherein the thickness is within a range from about 1 nm to about 10 nm.
16. The method of claim 1 , wherein the first and second sacrificial layers are exposed to a wet etch solution during the epitaxial lift off process.
17. The method of claim 16 , wherein the wet etch solution comprises hydrofluoric acid, a surfactant, and a buffer.
18. The method of claim 16 , wherein the first and second sacrificial layers are etched at a rate of about 0.3 mm/hr or greater.
19. The method of claim 18 , wherein the rate is about 1 mm/hr or greater.
20. The method of claim 19 , wherein the rate is about 5 mm/hr or greater.
21. A method for forming epitaxial film stacks on a substrate surface, comprising:
forming a first sacrificial layer on a substrate within a first deposition region of a processing chamber;
forming a first epitaxial film over the first sacrificial layer within a second deposition region of the processing chamber;
forming a second sacrificial layer over the first epitaxial film within the first deposition region of the processing chamber;
forming a second epitaxial film over the second sacrificial layer within the second deposition region of the processing chamber;
forming additional epitaxial stacks on the substrate and over the second epitaxial stack, wherein each additional epitaxial stack comprises an epitaxial film deposited over a sacrificial layer and each sacrificial layer is deposited on the epitaxial film of the previously deposited epitaxial stack; and
separating the first and second epitaxial films from the substrate during an epitaxial lift off process by:
etching away the second sacrificial layer while removing the second epitaxial film; and
etching away the first sacrificial layer while removing the first epitaxial film.
22. The method of claim 21 , wherein the first and second epitaxial films are simultaneously separated from the substrate.
23. The method of claim 21 , wherein etching away the first sacrificial layer while removing the first epitaxial film is subsequent to etching away the second sacrificial layer while removing the second epitaxial film.
24. The method of claim 21 , further comprising:
forming a third sacrificial layer over the second epitaxial film within the first deposition region of the processing chamber; and
forming a third epitaxial film over the third sacrificial layer within the second deposition region of the processing chamber prior to the epitaxial lift off process.
25. The method of claim 21 , wherein each of the first and second epitaxial films independently comprises a layer comprising gallium arsenide and another layer comprising aluminum gallium arsenide.
26. The method of claim 21 , wherein each of the first and second epitaxial films independently comprises a gallium arsenide buffer layer, a first aluminum gallium arsenide passivation layer, a gallium arsenide active layer, and a second aluminum gallium arsenide passivation layer.
27. The method of claim 21 , wherein each of the first and second epitaxial films comprises a photovoltaic cell structure of multiple layers, and each of the photovoltaic cell structures independently comprises at least two materials selected from the group consisting of gallium arsenide, n-doped gallium arsenide, p-doped gallium arsenide, aluminum gallium arsenide, n-doped aluminum gallium arsenide, p-doped aluminum gallium arsenide, indium gallium phosphide, alloys thereof, derivatives thereof, and combinations thereof.
28. The method of claim 21 , wherein each of the first and second sacrificial layers independently comprises a material selected from the group consisting of aluminum arsenide, alloys thereof, derivatives thereof, and combinations thereof.
29. The method of claim 26 , wherein each of the first and second sacrificial layers independently has a thickness of about 20 nm or less.
30. The method of claim 21 , wherein the substrate is disposed on a rotatable platen or a rotatable drum within the processing chamber.
31. The method of claim 30 , wherein a plurality of substrates is disposed on the rotatable platen or the rotatable drum within the processing chamber, and the sacrificial layers and the epitaxial films are deposited on each of the substrates.
32. The method of claim 30 , wherein the substrate is positioned under a first showerhead to deposit the first sacrificial layer and the substrate is subsequently rotated and positioned under a second showerhead to deposit the first epitaxial film within the processing chamber.
33. The method of claim 30 , wherein each epitaxial film comprises multiple layers, and each layer is deposited from different regions or from different showerheads within the processing chamber.
34. A method for forming epitaxial film stacks on a substrate surface within a processing chamber, comprising:
forming a first epitaxial stack on a substrate by:
depositing a first sacrificial layer over the substrate; and
depositing a first epitaxial film over the first sacrificial layer;
forming additional epitaxial stacks on the substrate and over the first epitaxial stack, wherein each additional epitaxial stack comprises an epitaxial film deposited over a sacrificial layer and each sacrificial layer is deposited on the epitaxial film of the previously deposited epitaxial stack; and
etching the sacrificial layers while removing the epitaxial films from the substrate during an epitaxial lift off process.
35. The method of claim 34 , wherein the substrate is disposed on a rotatable platen or a rotatable drum within the processing chamber.
36. The method of claim 35 , wherein a plurality of substrates is disposed on the rotatable platen or the rotatable drum within the processing chamber, and the sacrificial layers and the epitaxial films are deposited on each of the substrates.
37. The method of claim 35 , wherein the substrate is positioned under a first showerhead to deposit the sacrificial layers and the substrate is subsequently rotated and positioned under a second showerhead to deposit the epitaxial films within the processing chamber.
38. The method of claim 35 , wherein each epitaxial film comprises multiple layers, and each layer is deposited from different regions or from different showerheads within the processing chamber.
39. The method claim 35 , wherein each epitaxial film independently comprises a material selected from the group consisting of gallium arsenide, aluminum gallium arsenide, indium gallium phosphide, alloys thereof, derivatives thereof, and combinations thereof.
40. The method of claim 35 , wherein each epitaxial film independently comprises a layer comprising gallium arsenide and another layer comprising aluminum gallium arsenide.
41. The method of claim 35 , wherein each epitaxial film independently comprises a gallium arsenide buffer layer, an aluminum gallium arsenide passivation layer, and a gallium arsenide active layer.
42. The method of claim 35 , wherein each epitaxial film comprises a photovoltaic cell structure of multiple layers, and each of the photovoltaic cell structure comprises at least two materials selected from the group consisting of gallium arsenide, n-doped gallium arsenide, p-doped gallium arsenide, aluminum gallium arsenide, n-doped aluminum gallium arsenide, p-doped aluminum gallium arsenide, indium gallium phosphide, alloys thereof, derivatives thereof, and combinations thereof.
43. The method of claim 35 , wherein 3 or more epitaxial stacks are contained within the plurality of epitaxial stacks.
44. The method of claim 41 , wherein 6 or more epitaxial stacks are contained within the plurality of epitaxial stacks.
45. The method of claim 42 , wherein the plurality of epitaxial stacks contains at least about 10 epitaxial stacks and up to about 100 epitaxial stacks.
46. The method of claim 35 , wherein each of the sacrificial layers independently comprises a material selected from the group consisting of aluminum arsenide, alloys thereof, derivatives thereof, and combinations thereof.
47. The method of claim 35 , wherein the substrate comprises gallium arsenide, alloys thereof, dopants thereof, or derivatives thereof.