Method and structure of monolithetically integrated microneedle biochip
The present invention provides a method and device using CMOS and MEMS fabrication techniques for making an integrated microneedle device with integrated circuits. Merely by way of example, the technology can be applied to bio and chemical sensing, and other bioMEMS applications. In some embodiments, the integrated circuits are completed using standard IC processes. For example, an array of microneedles are fabricated on top of the IC substrate followed by formation of micro fluidic channels in the substrate. On-chip integrated circuits enable real-time sensing and intelligent drug delivery.
1. An integrated biosensor and circuit device comprising:
a semiconductor substrate comprising a surface region;
a CMOS integrated circuit layer overlying the surface region;
one or more dielectric layers overlying the CMOS integrated circuit layer;
a fluid chamber region overlying the CMOS integrated circuit layer;
one or more needle devices in communication with the fluid chamber region, the one or more needle devices overlying the CMOS integrated circuit layer, each of the needle devices having fluid channel therein, the fluid channel extending from a base region to a vicinity of a tip region, the one or more needle devices being configured to be supported by one or more members integrally formed overlying the CMOS integrated circuit device layer; and
one or more sensing devices coupled to the one or more needle devices, the one or more sensing devices provided from the CMOS integrated circuit device layer.
2. The device of claim 1 wherein the tip region ranges from a few nanometers to about microns.
3. The device of claim 1 wherein the one or more sensing devices are provided in the fluid chamber.
4. The device of claim 1 wherein the tip is made of a material selected from silicon, titanium nitride, titanium, or stainless steel.
5. The device of claim 1 wherein the one or more needle devices comprise a plurality of needle devices configured in an N by M array, wherein M is an integer greater than 2.
6. The device of claim 1 further comprising a pump device in communication with the fluid chamber.
7. The device of claim 1 further comprising a drug source in communication with the fluid chamber.
8. The device of claim 1 further comprising one or more actuator devices in fluid communication with the fluid chamber, the one or more actuator devices being coupled to one or more drive devices, the one or more drive devices being selected from a group consisting of one or more electrodes, one or more PZT devices, one or more diaphragm devices, one or more thermal devices, or one or more magnetic devices.