Method of manufacturing thin film transistor, thin film transistor, and display unit
View Patent ↗A method of manufacturing a thin film transistor capable of simplifying the steps is provided. The method of manufacturing a thin film transistor includes the steps of: forming a gate electrode and a gate insulating film sequentially on a substrate; forming an oxide semiconductor film in a shape including a planned channel formation region, a planned source electrode formation region, and a planned drain electrode formation region on the gate insulating film so that the whole oxide semiconductor film has the same carrier density as a carrier density of the planned channel formation region; forming a mask inhibiting heat transmission on the planned channel formation region; and heating the oxide semiconductor film in the air and thereby obtaining a higher carrier density of a region of the oxide semiconductor film not covered with the mask than the carrier density of the planned channel formation region.
1. A method of manufacturing a thin film transistor comprising the steps of:
forming a gate electrode and a gate insulating film sequentially on a substrate;
forming an oxide semiconductor film in a shape including a planned channel formation region, a planned source electrode formation region, and a planned drain electrode formation region on the gate insulating film so that the whole oxide semiconductor film has the same carrier density as a carrier density of the planned channel formation region;
forming a mask inhibiting heat transmission on the planned channel formation region; and
heating the oxide semiconductor film in the air and thereby obtaining a higher carrier density of a region of the oxide semiconductor film not covered with the mask than the carrier density of the planned channel formation region.
2. The method of manufacturing a thin film transistor according to claim 1 , wherein the mask is made of a photoresist.
3. The method of manufacturing a thin film transistor according to claim 1 , wherein the oxide semiconductor film is formed by using sputtering method at a predetermined electric power, and the electric power is set according to the carrier density of the planned channel formation region.
4. The method of manufacturing a thin film transistor according to claim 3 , wherein the sputtering method is DC sputtering method.
5. The method of manufacturing a thin film transistor according to claim 3 , wherein the electric power in the sputtering method is set to from 50 W to 500 W both inclusive.
6. The method of manufacturing a thin film transistor according to claim 3 , wherein in the step of forming the oxide semiconductor film, the carrier density of the planned channel formation region is set to from 1.0*10 13 /cm 3 to 1.0*10 18 /cm 3 both inclusive.
7. The method of manufacturing a thin film transistor according to claim 6 , wherein by performing the step of heating the oxide semiconductor film in the air, the carrier density of the region of the oxide semiconductor film not covered with the mask is set to 1.0*10 19 /cm 3 or more and less than 1.0*10 21 /cm 3 , and the carrier density of the planned channel formation region is set to 1.0*10 13 /cm 3 or more and less than 1.0*10 18 /cm 3 .
8. The method of manufacturing a thin film transistor according to claim 1 , wherein the oxide semiconductor film is heated at temperature from 100 deg C. to 200 deg C. both inclusive.