IP Library Granted Patent US 8,129,809
Granted Patent B2
US 8,129,809 · App. 12/638,157 · Granted Mar 6, 2012

Image sensor and manufacturing method thereof

Assignee: Dongbu Hitek Co., Ltd.
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Quick Facts
Patent No.
US 8,129,809
App. No.
12/638,157
Filed
Dec 15, 2009
Granted
Mar 6, 2012
Kind
B2
Art Unit
2818
USPC
257/436
Abstract

Disclosed are an image sensor and a manufacturing method thereof. The image sensor includes a circuit layer on a first surface of a semiconductor substrate, a metal interconnection layer on the circuit layer, trenches formed in a second surface of the semiconductor substrate along a boundary of a pixel, and a light blocking layer in the trenches. The backside illumination type image sensor according to the embodiment has a light blocking structure at a rear surface of the semiconductor substrate, thereby improving sensing efficiency while inhibiting interference between adjacent pixels.

Claims (15)

1. An image sensor comprising:

a circuit layer on a first surface of a semiconductor substrate;

a metal interconnection layer on the circuit layer;

trenches formed in a second surface of the semiconductor substrate along a boundary of a pixel;

a first light blocking layer in the trenches;

photodiodes in the first surface of the semiconductor; and

a second light blocking layer,

wherein the second light blocking layer includes an isolation layer extended from the first surface of the semiconductor substrate towards the second surface of the semiconductor substrate, wherein the second light blocking layer is formed between the photodiodes, and

wherein the second light blocking layer vertically overlaps with the first light blocking layer.

2. The image sensor of claim 1 , further comprising a color filter layer on the second surface having the first light blocking layer.

3. The image sensor of claim 2 , wherein the first light blocking layer is obtained by filling a portion of a first color filter of the color filter layer in the trenches.

4. The image sensor of claim 3 , wherein the first color filter includes blue color filter resin.

5. The image sensor of claim 1 , wherein the first light blocking layer includes blue color filter resin.

6. The image sensor of claim 1 , wherein the first light blocking layer includes at least one selected from the group consisting of Cu, W, Ti, Ta, Co, Al and Mo.

7. The image sensor of claim 1 , wherein the trenches have a depth of about 1˜2 μm.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 1, 2025
From: INTELLECTUAL DISCOVERY
To: CLAIRPATH, LLC
Reel/Frame 072430/0707 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 26, 2014
From: DONGBU HITEK CO., LTD
To: INTELLECTUAL DISCOVERY CO., LTD.
Reel/Frame 033831/0789 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 15, 2009
From: JANG, HOON
To: DONGBU HITEK CO., LTD.
Reel/Frame 023654/0906 →
Priority Claims (1)
KR 10-2008-0133073 · Dec 24, 2008 · national
Continuity (1)
Related Publication 20100155868A1 · Jun 24, 2010