Flexural vibration element and electronic component
View Patent ↗A flexural vibration element includes: a plurality of vibrating arms provided in parallel with each other; a connecting part connecting the vibrating arms; and one central supporting arm extending between the vibrating arms from the connecting part in parallel with the vibrating arms at equal distance from the arms. In the flexural vibration element, the connecting part has a groove formed on each of front and rear surfaces thereof, and the groove is provided in an area of the connecting part in which compressive stress and tensile stress due to flexural vibration of the vibrating arms alternately occur at a vibrating arm side and an opposite side of the vibrating arm side, in a width direction of the vibrating arms.
1. A flexural vibration element, comprising:
a plurality of vibrating arms provided in parallel with each other;
a connecting part connecting the vibrating arms; and
one central supporting arm extending between the vibrating arms from the connecting part in parallel with the arms at equal distance from the arms,
wherein the connecting part has a groove formed on each of front and rear surfaces thereof in a width direction of the vibrating arms,
the groove being provided between one of the plurality of vibrating arms and the the central supporting arm, and being positioned in an area of the connecting part in which compressive stress and tensile stress due to flexural vibration of the vibrating arms alternately occur at a vibrating arm side and an opposite side of the vibrating arm side.
2. The flexural vibration element according to claim 1 , wherein the groove has a bottom.
3. The flexural vibration element according to claim 1 , wherein the groove is a through groove.
4. The flexural vibration element according to claim 1 , wherein a width W of the groove, in a longitudinal direction of the vibrating arms, with respect to a width T of the connecting part is in a range of 0.1T≦W≦0.65 T.
5. The flexural vibration element according to claim 4 , wherein the width W of the groove, in the longitudinal direction of the vibrating arms, with respect to the width T of the connecting part is in a range of 0.2T≦W≦0.6 T.
6. The flexural vibration element according to claim 1 , wherein the vibrating arms, the connecting part, and the central supporting arm are made of quartz crystal and formed in an integrated manner.
7. An electronic component, comprising:
The flexural vibration element according to claim 1 .
8. The flexural vibration element according to claim 1 , wherein the groove of the connecting part is formed only in a portion of the connecting part between the one of the plurality of vibrating arms and the central supporting arm.
9. The flexural vibration element according to claim 1 , the connecting part having a second groove form on both a front and rear surface thereof in a width direction of the vibrating arms, the second groove being provided between a second vibrating arm of the plurality of vibrating arms and the central supporting arm.
10. The flexural vibration element according to claim 1 , the second groove being provided only between the second vibrating arm and the central supporting arm.