Method for treating surface of oxide glass with fluorinating agent
View Patent ↗To provide a novel fluorination treatment method whereby the surface of oxide glass can be treated for fluorination at low cost and with excellent adhesiveness. A method for treating the surface of oxide glass, which comprises contacting the surface of oxide glass with a gas of a fluorinating agent or a mixed gas having a fluorinating agent diluted with an inert gas, wherein the fluorinating agent is an elemental fluorine, or a fluorine compound capable of cleaving a bond between an oxygen atom and a metal atom in the framework of the oxide glass and forming a bond between a fluorine atom and the metal atom; and the concentration of hydrogen fluoride at the surface of oxide glass with which the fluorinating agent is in contact, is controlled to be at most 1 mol %.
1. The method for treating the surface of oxide glass comprising contacting the surface of oxide glass with a mixed gas comprising elemental fluorine as a fluorinating agent diluted with an inert gas, wherein a dew point of said inert gas is at most −10° C., wherein a concentration of hydrogen fluoride at the surface of oxide glass with which said mixed gas is in contact, is controlled to be at most 1 mol% by carrying out the procedure of contacting the surface of oxide glass with said mixed gas, in a closed container containing said mixed gas and a solid metal fluoride, wherein a temperature of said mixed gas is within a range of from −50 to 300° C.
2. The method for treating the surface of oxide glass according to claim 1 wherein said inert gas is at least one gas selected from the group consisting of nitrogen, helium and argon.
3. The method for treating the surface of oxide glass according to claim 1 , wherein said surface of oxide glass is contacted with a mixed gas having a fluorinating agent diluted with an inert gas comprising nitrogen and wherein a concentrate of said elemental fluorine is from 100 mol ppm to 50 mol %.
4. The method for treating the surface of oxide glass according to claim 1 , wherein said surface of oxide glass is contacted with a mixed gas having a fluorinating agent diluted with an inert gas comprising nitrogen and wherein a concentrate of said elemental fluorine is from 1,000 mol ppm to 20 mol %.
5. The method for treating the surface of oxide glass according to claim 1 , wherein said temperature of said gas or mixed gas is within a range of from −20 to 250° C.
6. The method for treating the surface of oxide glass according to claim 1 , wherein a dew point of said inert gas is at most −40° C.
7. The method for treating the surface of oxide glass according to claim 1 , wherein a dew point of said inert gas is at most −60° C.
8. The method for treating the surface of oxide glass comprising contacting the surface of oxide glass with or a mixed gas comprising elemental fluorine as a fluorinating agent diluted with an inert gas, wherein a dew point of said inert gas is at most −10° C., wherein a concentration of hydrogen fluoride at the surface of oxide glass with which said mixed gas is in contact, is controlled to be at most 1 mol % by carrying out a procedure of contacting the surface of oxide glass with said mixed gas in a gas phase by setting the oxide glass in a pipe line in which said mixed gas continuously flows,
wherein a temperature of said mixed gas is within a range of from −50 to 700° C.
9. The method for treating the surface of oxide glass according to claim 8 , wherein said temperature of said mixed gas is within a range of from 0 to 650° C.
10. The method for treating the surface of oxide glass according to claim 8 , wherein said temperature of said gas or mixed gas is within a range of from 100 to 600° C.
11. The method for treating the surface of oxide glass according to claim 8 , wherein said inert gas is at least one gas selected from the group consisting of nitrogen, helium and argon.
12. The method for treating the surface of oxide glass according to claim 8 , wherein said surface of oxide glass is contacted with a mixed gas having a fluorinating agent diluted with an inert gas comprising nitrogen and wherein a concentrate of said elemental fluorine is from 100 mol ppm to 50 mol %.
13. The method for treating the surface of oxide glass according to claim 8 , wherein said surface of oxide glass is contacted with a mixed gas having a fluorinating agent diluted with an inert gas comprising nitrogen and wherein a concentrate of said elemental fluorine is from 1,000 mol ppm to 20mol%.
14. The method for treating the surface of oxide glass according to claim 8 , wherein a dew point of said inert gas is at most −40° C.
15. The method for treating the surface of oxide glass according to claim 8 , wherein a dew point of said inert gas is at most −60° C.