Piezoelectric thin film resonant element and circuit component using the same
A piezoelectric thin film resonant element includes a resonant portion having a laminate structure made up of a lower electrode, an upper electrode and a piezoelectric film arranged between these two electrodes. The lower electrode has an ellipsoidal plan-view shape and an outer circumference formed with an inclined portion inclined at an angle (about 30° for example) lying within a range of 25° through 55°. The upper electrode has an ellipsoidal plan-view shape. An additional film is provided on the upper electrode at a portion corresponding to the inclined portion of the lower electrode.
1. A piezoelectric thin film resonant element comprising a resonant portion and a non-resonant portion adjacent to the resonant portion, the resonant portion having a laminate structure including:
a piezoelectric film having a predetermined plan-view shape;
a lower electrode formed on a lower surface of the piezoelectric film and having an edge formed with an inclined portion which is inclined with respect to a surface of the film at a predetermined angle;
an upper electrode formed on an upper surface of the piezoelectric film; and
an additional film formed on the upper electrode at a position corresponding to the inclined portion of the lower electrode; the piezoelectric thin film resonant element also comprising a substrate supporting the resonant portion,
wherein a cavity is provided under the lower electrode, the cavity extending through the resonant portion and into the non-resonant portion, and at least part of the additional film is disposed at a position offset from an end of the cavity toward a center of the cavity,
wherein the resonant portion has a greater acoustic impedance at a part of the laminate structure corresponding to the inclined portion of the lower electrode than a part of the laminate structure inner than the inclined portion of the lower electrode.
2. The piezoelectric thin film resonant element according to claim 1 , wherein the piezoelectric film is made of aluminum nitride or zinc oxide having an orientation with a main axis in a (002) direction.
3. A circuit component comprising at least one piezoelectric thin film resonant element in accordance with claim 1 .
4. A piezoelectric thin film resonant element comprising:
a resonant portion having a laminate structure including: a piezoelectric film having a predetermined plan-view shape; a lower electrode formed on a lower surface of the piezoelectric film and having an edge formed with an inclined portion which is inclined with respect to a surface of the film at a predetermined angle; and an upper electrode formed on an upper surface of the piezoelectric film;
a non-resonant portion adjacent to the resonant portion; and
an additional film formed on the upper electrode at a position corresponding to the inclined portion of the lower electrode, wherein the upper electrode includes an inclined portion at a position corresponding to the inclined portion of the lower electrode, the additional film being provided at least on the inclined portion of the upper electrode,
wherein a cavity is provided under the lower electrode, the cavity extending through the resonant portion and into the non-resonant portion, and at least part of the additional film is disposed at a position offset from an end of the cavity toward a center of the cavity,
wherein the upper electrode includes an exposed portion that is not covered with the additional film, the exposed portion being located in the resonant portion.
5. The piezoelectric thin film resonant element according to claim 4 , further comprising a terminal electrode connected to the upper electrode, wherein the additional film extends from the inclined portion of the upper electrode onto the terminal electrode.
6. The piezoelectric thin film resonant element according to claim 4 , further comprising a terminal electrode connected to the upper electrode, wherein the additional film extends from an inner position relative to the inclined portion of the upper electrode onto the terminal electrode.
7. The piezoelectric thin film resonant element according to claim 4 , wherein the piezoelectric film is provided with an inclined portion at an outer circumference of the resonant portion, the inclined portion of the piezoelectric film being inclined with respect to a surface of the piezoelectric film at a predetermined angle, the piezoelectric film including an outer circumference arranged inner than an outer circumference of the upper electrode.
8. The piezoelectric thin film resonant element according to claim 4 , wherein the angle of the inclined portion of the lower electrode lies in a range from 25° through 55°.
9. The piezoelectric thin film resonant element according to claim 4 , wherein the piezoelectric film is made of aluminum nitride or zinc oxide having an orientation with a main axis in a (002) direction.
10. A circuit component comprising at least one piezoelectric thin film resonant element in accordance with claim 4 .
11. The piezoelectric thin film resonant element according to claim 1 , wherein an angle of the inclined portion lies in a range from 25° through 55°.
12. The piezoelectric thin film resonant element according to claim 11 , wherein the inclined portion is provided in part of said edge of the lower electrode.
13. The piezoelectric thin film resonant element according to claim 11 , wherein the piezoelectric film is made of aluminum nitride or zinc oxide having an orientation with a main axis in a (002) direction.
14. The piezoelectric thin film resonant element according to claim 8 , wherein the inclined portion of the lower electrode is provided in part of said edge of the lower electrode.