Thin film field effect transistor with dual semiconductor layers
View Patent ↗A thin film field effect transistor is disclosed which provides improved time-based channel stability. The field effect transistor includes first and second disordered semiconductor layers separated by an insulator. In an embodiment a carrier injection terminal is provided in a thin semiconductor layer closest to the gate terminal. An electric field is established in the thin semiconductor layer. At sufficient field strength, the electric field extends into the second semiconductor layer, which is in contact with the source and drain terminals. At sufficient field strength a channel is established in the second semiconductor layer, permitting current to flow between source and drain terminals. Above a certain gate voltage, there is sufficient free charge is induced in the first semiconductor layer so that the field does not extend into the second semiconductor, effectively shutting off current between source and drain. Single-device transition detection (as well as other applications) may be obtained.
1. A field effect transistor, comprising:
a substrate;
a gate terminal formed over at least a portion of said substrate;
a first insulator layer formed over said gate terminal and a portion of said substrate;
a first carrier injection terminal formed over at least a portion of said first insulator layer;
a first semiconductor layer formed over said first carrier injection terminal and a portion of said first insulator layer, said first semiconductor layer being formed of a disordered material;
a second insulator layer formed over said first semiconductor layer;
a source terminal formed over said second insulator;
a drain terminal formed adjacent to and spaced apart from said source terminal and over said second insulator; and
a second semiconductor layer formed over said source terminal, said drain terminal, and a portion of said second insulator layer, said second semiconductor layer being formed of a disordered material.
2. The field effect transistor of claim 1 , in which both the first and second semiconductor layers are formed of a material selected from the group consisting of: amorphous silicon (a-Si:H), and disordered organic semiconductors.
3. The field effect transistor of claim 1 , further comprising a second carrier injection terminal formed in a same layer as and adjacent said first carrier injection terminal.
4. The field effect transistor of claim 1 , wherein said second semiconductor layer has a thickness which is between 1.5 and 2.5 times the thickness of said first semiconductor layer.
5. A field effect transistor, comprising:
a substrate;
a source terminal formed over said substrate;
a drain terminal formed adjacent to and spaced apart from said source terminal and over said substrate;
a first semiconductor layer formed over said source and drain terminals and over exposed portions of said substrate, said first semiconductor layer being formed of a disordered material;
a first insulator layer formed over said first semiconductor layer;
a first carrier injection terminal formed over at least a portion of said first insulator layer;
a second semiconductor layer formed over said first carrier injection terminal and a portion of said first insulator layer, said second semiconductor layer being formed of a disordered material;
a second insulator layer formed over said second semiconductor layer; and
a gate terminal formed over at least a portion of said second insulator layer.
6. The field effect transistor of claim 5 , further comprising an adhesion/insulator layer formed over said substrate and under said source and drain terminals and said first semiconductor layer.
7. The field effect transistor of claim 5 , in which both the first and second semiconductor layers are formed of a material selected from the group consisting of: amorphous silicon (a-Si:H), and disordered organic semiconductors.
8. The field effect transistor of claim 5 , further comprising a second carrier injection terminal formed in a same layer as and adjacent said first carrier injection terminal.
9. The field effect transistor of claim 5 , wherein said first semiconductor layer has a thickness which is substantially equal to between 1.5 and 2.5 times the thickness of said second semiconductor layer.
10. A field effect transistor, comprising:
a substrate;
a gate terminal formed over at least a portion of said substrate;
a first insulator layer formed over said gate terminal and a portion of said substrate;
a first carrier injection terminal formed over at least a portion of said first insulator layer;
a first semiconductor layer formed over said first carrier injection terminal and a portion of said first insulator layer, said first semiconductor layer being formed of a disordered material;
a second insulator layer formed over said first semiconductor layer;
a second semiconductor layer formed over said second insulator layer, said second semiconductor layer being formed of a disordered material; and
a source terminal formed over a portion of said second semiconductor layer;
a drain terminal formed adjacent to and spaced apart from said source terminal and over a portion of said second semiconductor layer.
11. The field effect transistor of claim 10 , in which both the first and second semiconductor layers are formed of a material selected from the group consisting of: amorphous silicon (a-Si:H), and disordered organic semiconductors.
12. The field effect transistor of claim 10 , further comprising a second carrier injection terminal formed in a same layer as and adjacent said first carrier injection terminal.
13. The field effect transistor of claim 10 , wherein said second semiconductor layer has a thickness which is between 1.5 and 2.5 times the thickness of said first semiconductor layer.
14. The field effect transistor of claim 10 , further comprising first and second implantation regions located in said second semiconductor layer and substantially below said source terminal and said drain terminal, respectively.