Electroplating methods and chemistries for deposition of copper-indium-gallium containing thin films
View Patent ↗The present invention provides a method and precursor structure to form a solar cell absorber layer. The method includes electrodepositing a first layer including a film stack including at least a first film comprising copper, a second film comprising indium and a third film comprising gallium, wherein the first layer includes a first amount of copper, electrodepositing a second layer onto the first layer, the second layer including at least one of a second copper-indium-gallium-ternary alloy film, a copper-indium binary alloy film, a copper-gallium binary alloy film and a copper-selenium binary alloy film, wherein the second layer includes a second amount of copper, which is higher than the first amount of copper, and electrodepositing a third layer onto the second layer, the third layer including selenium; and reacting the precursor stack to form an absorber layer on the base.
1. A method of forming a solar cell absorber on a base, comprising:
forming a precursor stack, comprising:
electrodepositing a first layer including a film stack including at least a first film comprising copper, a second film comprising indium and a third film comprising gallium, wherein the first layer includes a first amount of copper,
electrodepositing a second layer onto the first layer, the second layer including a copper-selenium binary alloy film, wherein the second layer includes a second amount of copper, which is higher than the first amount of copper, and
electrodepositing a third layer onto the second layer, the third layer including selenium; and
reacting the precursor stack to form an absorber layer on the base.
2. The method of claim 1 , wherein the first amount of copper includes about 35-49% of the total molar copper amount in the precursor stack, and the second amount of copper includes about 51-65% of the total molar copper amount in the precursor stack.
3. The method of claim 2 , wherein the step of electrodepositing the first layer electrodeposits at least the film stack, and the film stack includes a stack order comprising one of copper/indium/copper/gallium, copper/gallium/copper/indium, and indium/copper/gallium.
4. The method of claim 3 , wherein the step of electrodepositing the first layer electrodeposits at least the film stack and at least one of the first film and the third film comprises copper-gallium binary alloy.
5. The method of claim 2 , wherein the step of electrodepositing the first layer electrodeposits at least the film stack, and wherein the film stack further includes a fourth copper film.
6. The method of claim 5 , wherein the film stack includes a stack order comprising one of copper/gallium/copper/indium and copper/indium/copper/gallium.
7. The method of claim 1 , wherein the step of electrodepositing the first layer electrodeposits at least the film stack and at least one of the first film and the second film comprises copper-indium binary alloy.
8. The method of claim 1 , wherein the step of electrodepositing the first layer electrodeposits at least the film stack and at least one of the first film and the third film comprises copper-gallium binary alloy.
9. The method of claim 1 , wherein copper in the second layer is graded so that the amount of copper adjacent the first layer is less than the amount of copper at the top of the second layer.
10. The method of claim 9 , wherein the step of electrodepositing the second layer comprises electrodepositing a lower copper selenide portion on the first layer and an upper copper selenide portion on the lower copper selenide portion.
11. The method of claim 10 , wherein the upper copper selenide portion includes more copper than the lower copper selenide portion.
12. The method of claim 1 , wherein the step of electrodepositing the second layer comprises electrodepositing a lower copper selenide portion on the first layer and an upper copper selenide portion on the lower copper selenide portion.
13. The method of claim 12 , wherein the upper copper selenide portion includes more copper than the lower copper selenide portion.
14. The method of claim 1 , wherein the step of electrodepositing the second layer comprises electrodepositing a copper selenide layer on the first layer and depositing a copper cap on the copper selenide layer.