Wafer structure to reduce dark current
View Patent ↗A wafer structure for an image sensor includes a substrate that has a given conductivity type, a given dopant concentration, and a given concentration of oxygen. An intermediate epitaxial layer is formed over the substrate. The intermediate epitaxial layer has the same conductivity type and the same, or substantially the same, dopant concentration as the substrate but a lower oxygen concentration than the substrate. A thickness of the intermediate epitaxial layer is greater than the diffusion length of a minority carrier in the intermediate layer. A device epitaxial layer is formed over the intermediate epitaxial layer. The device epitaxial layer has the same conductivity type but lower dopant and oxygen concentrations than the substrate.
1. A method for fabricating a wafer structure for an image sensor, the method comprising:
forming an intermediate epitaxial layer over a substrate having a first conductivity type, a first dopant concentration, and a first oxygen concentration, wherein the intermediate epitaxial layer has the first conductivity type and the first dopant concentration as in the substrate but a lower oxygen concentration than the first oxygen concentration in the substrate, and wherein a thickness of the intermediate epitaxial layer is greater than the diffusion length of minority charge carriers in the intermediate layer; and
forming a device epitaxial layer over the intermediate epitaxial layer, wherein the device epitaxial layer has the first conductivity type of the intermediate epitaxial layer and the substrate but includes a lower dopant concentration than the first dopant concentration in the intermediate epitaxial layer and the substrate and a lower oxygen concentration than the first oxygen concentration in the substrate.
2. The method of claim 1 , wherein the conductivity type comprises a p conductivity type.
3. The method of claim 1 , wherein the conductivity type comprises an n conductivity type.
4. A wafer structure for an image sensor, the wafer structure comprising:
a substrate including a first conductivity type, a first dopant concentration, and a first oxygen concentration;
an intermediate epitaxial layer disposed over the substrate, wherein the intermediate epitaxial layer includes the first conductivity type and the first dopant concentration as in the substrate but a lower oxygen concentration than the first oxygen concentration in the substrate, and wherein the thickness of the intermediate epitaxial layer is greater than the diffusion length of minority charge carriers in the intermediate layer; and
a device epitaxial layer disposed over the intermediate epitaxial layer, wherein the device epitaxial layer includes the first conductivity type of the intermediate epitaxial layer and the substrate but includes a lower dopant concentration than the first dopant concentration in the intermediate epitaxial layer and the substrate and a lower oxygen concentration than the first oxygen concentration in the substrate.
5. The wafer structure as in claim 4 , further comprising a plurality of photosensitive regions disposed in the device epitaxial layer.
6. The wafer structure as in claim 4 , wherein the first conductivity type comprises a p conductivity type.
7. The wafer structure as in claim 4 , wherein the first conductivity type comprises an n conductivity type.
8. An image capture device, comprising:
an image sensor that includes a wafer structure comprising:
a substrate including a first conductivity type, a first dopant concentration, and a first oxygen concentration;
an intermediate epitaxial layer disposed over the substrate, wherein the intermediate epitaxial layer includes the first conductivity type and the first dopant concentration as in the substrate but a lower oxygen concentration than the first oxygen concentration in the substrate, and wherein the thickness of the intermediate epitaxial layer is greater than the diffusion length of minority charge carriers in the intermediate layer; and
a device epitaxial layer disposed over the intermediate epitaxial layer, wherein the device epitaxial layer includes the first conductivity type of the intermediate epitaxial layer and the substrate but includes a lower dopant concentration than the first dopant concentration in the intermediate epitaxial layer and the substrate and a lower oxygen concentration than the first oxygen concentration in the substrate.
9. The image capture device of claim 8 , wherein the first conductivity type comprises a p conductivity type.
10. The image capture device of claim 8 , wherein the first conductivity type comprises an n conductivity type.