Granted Patent B1

US 8,277,669 · App. 12/643,954 · Granted Oct 2, 2012

Abstract

Claims (201)

1. A method for fabricating a pole of a magnetic transducer having an air-bearing surface (ABS) location, the method comprising:

providing a leading shield layer;

providing a planarization stop layer on the leading shield layer;

removing a portion of the planarization stop layer distal from the ABS location to form an aperture therein and a portion of the leading shield layer distal from the ABS location to form a depression therein, the depression forming a bevel distal from the ABS location, the bevel being at an angle greater than zero degrees and less than ninety degrees from a direction perpendicular to the ABS location;

providing an intermediate layer having a top surface substantially perpendicular to the ABS location and covering at least the depression in the leading shield layer;

removing a portion of the intermediate layer to form a trench therein, the trench having a bottom corresponding to the leading shield and a location and a profile corresponding to the pole, the bottom of the trench having a sloped surface corresponding to the bevel;

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench;

providing the pole in the trench, the pole residing on the portion of the nonmagnetic layer and having a leading edge bevel corresponding to the bevel;

providing a capping layer covering the pole;

removing at least a portion of the intermediate layer; and

providing a wrap-around shield.

2. The method of claim 1 wherein the leading shield layer includes a leading shield surface between the ABS location and the depression, the leading shield surface being substantially perpendicular to the ABS location, and wherein the step of providing the intermediate layer further includes:

depositing a refill material on the planarization stop layer and the leading shield layer, a portion of the refill material residing in the depression;

planarizing the magnetic transducer;

providing a flattening mill, the flatting mill removing a remaining portion of the planarization stop layer, a remaining portion of the refill material having a refill surface substantially coplanar with the leading shield surface; and

depositing an additional nonmagnetic layer, the additional nonmagnetic layer having the top surface.

3. The method of claim 2 wherein the wrap-around shield is a non-conformal wrap-around shield and the step of removing at least a portion of the intermediate layer further includes:

removing a non-adjoining portion of the intermediate layer, a remaining portion of the intermediate layer adjoining the nonmagnetic layer; and

providing a side shield.

4. The method of claim 3 wherein the step of removing the intermediate layer further includes:

performing a reactive ion etch.

5. The method of claim 2 wherein the wrap-around shield is a conformal wrap-around shield and the step of removing at least a portion of the intermediate layer further includes:

removing an adjoining portion of the intermediate layer that adjoins the nonmagnetic layer and the capping layer; and

providing a side shield adjoining a portion of the nonmagnetic layer and the capping layer.

6. The method of claim 5 wherein the step of removing the intermediate layer further includes:

performing a wet etch.

7. The method of claim 5 wherein the step of providing the side shield further includes:

depositing at least one side shield material adjoining the portion of the nonmagnetic layer and the capping layer;

depositing an alumina fill layer on the at least one side shield material; and

planarizing the magnetic transducer.

8. The method of claim 1 wherein the step of providing the nonmagnetic layer further includes providing a nonmagnetic bilayer.

9. The method of claim 8 wherein the step of providing the nonmagnetic bilayer further includes:

providing a Ta layer and a first Ru layer.

10. The method of claim 9 wherein the step of providing the nonmagnetic layer further includes:

providing a second Ru layer on the nonmagnetic bilayer layer.

11. A method for fabricating a pole of a magnetic transducer having an air-bearing surface (ABS) location, the method comprising:

providing a leading shield layer;

providing a planarization stop layer on the leading shield layer, the planarization stop layer including at least one of Ta, Ru, and Cr;

removing a portion of the planarization stop layer distal from the ABS location to form an aperture therein and a portion of the leading shield layer distal from the ABS location to form a depression therein, the depression forming a bevel distal from the ABS location, the bevel being at an angle greater than zero degrees and less than ninety degrees from a direction perpendicular to the ABS location;

providing an intermediate layer having a top surface substantially perpendicular to the ABS location;

removing a portion of the intermediate layer to form a trench therein, the trench having a bottom corresponding to the leading shield and a location and a profile corresponding to the pole;

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench;

providing the pole in the trench, the pole residing on the portion of the nonmagnetic layer and having a leading edge bevel corresponding to the bevel;

providing a capping layer covering the pole;

removing at least a portion of the intermediate layer; and

providing a wrap-around shield.

12. A method for fabricating a pole of a magnetic transducer having an air-bearing surface (ABS) location, the method comprising:

providing a leading shield layer, wherein the leading shield layer includes a leading shield surface between the ABS location and the depression, the leading shield surface being substantially perpendicular to the ABS location, and wherein the step of providing the intermediate layer further includes

depositing a refill material on the planarization stop layer and the leading shield layer, a portion of the refill material residing in the depression;

planarizing the magnetic transducer;

providing a flattening mill, the flatting mill removing a remaining portion of the planarization stop layer, a remaining portion of the refill material having a refill surface substantially coplanar with the leading shield surface; and

depositing an additional nonmagnetic layer, the additional nonmagnetic layer having the to surface;

providing a planarization stop layer on the leading shield layer;

removing a portion of the planarization stop layer distal from the ABS location to form an aperture therein and a portion of the leading shield layer distal from the ABS location to form a depression therein, the depression forming a bevel distal from the ABS location, the bevel being at an angle greater than zero degrees and less than ninety degrees from a direction perpendicular to the ABS location;

providing an intermediate layer having a top surface substantially perpendicular to the ABS location, wherein the wrap-around shield is a conformal wrap-around shield and the step of removing at least a portion of the intermediate layer further includes:

removing an adjoining portion of the intermediate layer that adjoins the nonmagnetic layer and the capping layer; and

providing a side shield adjoining a portion of the nonmagnetic layer and the capping layer;

removing a portion of the intermediate layer to form a trench therein, the trench having a bottom corresponding to the leading shield and a location and a profile corresponding to the pole, the step of removing at least a portion of the intermediate layer further including

removing an adjoining portion of the intermediate layer that adjoins the nonmagnetic layer and the capping layer; and

providing a side shield adjoining a portion of the nonmagnetic layer and the capping layer;

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench wherein the step of providing the nonmagnetic layer further includes

providing a nonmagnetic bilayer including a Ta layer and a first Ru layer: and

providing a second Ru layer on the nonmagnetic bilayer layer using a chemical vapor deposition (CVD);

providing the pole in the trench, the pole residing on the portion of the nonmagnetic layer and having a leading edge bevel corresponding to the bevel;

providing a capping layer covering the pole;

removing at least a portion of the intermediate layer; and

providing a wrap-around shield, the wrap-around shield being a conformal wrap-around shield.

13. A method for fabricating a pole of a magnetic transducer having an air-bearing surface (ABS) location, the method comprising:

providing a leading shield layer, wherein the leading shield layer includes a leading shield surface between the ABS location and the depression, the leading shield surface being substantially perpendicular to the ABS location, and wherein the step of providing the intermediate layer further includes

depositing a refill material on the planarization stop layer and the leading shield layer, a portion of the refill material residing in the depression;

planarizing the magnetic transducer;

providing a flattening mill, the flatting mill removing a remaining portion of the planarization stop layer, a remaining portion of the refill material having a refill surface substantially coplanar with the leading shield surface; and

depositing an additional nonmagnetic layer, the additional nonmagnetic layer having the top surface;

providing a planarization stop layer on the leading shield layer;

removing a portion of the planarization stop layer distal from the ABS location to form an aperture therein and a portion of the leading shield layer distal from the ABS location to form a depression therein, the depression forming a bevel distal from the ABS location, the bevel being at an angle greater than zero degrees and less than ninety degrees from a direction perpendicular to the ABS location;

providing an intermediate layer having a top surface substantially perpendicular to the ABS location, wherein the step of removing at least a portion of the intermediate layer further includes:

removing an adjoining portion of the intermediate layer that adjoins the nonmagnetic layer and the capping layer; and

providing a side shield adjoining a portion of the nonmagnetic layer and the capping layer;

removing a portion of the intermediate layer to form a trench therein, the trench having a bottom corresponding to the leading shield and a location and a profile corresponding to the pole;

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench, wherein the step of providing the nonmagnetic layer further includes:

providing a Ru liner using a chemical vapor deposition (CVD) and

providing an alumina layer using atomic layer deposition;

providing the pole in the trench, the pole residing on the portion of the nonmagnetic layer and having a leading edge bevel corresponding to the bevel;

providing a capping layer covering the pole;

removing at least a portion of the intermediate layer; and

providing a wrap-around shield, the wrap-around shield being a conformal wrap-around shield.

14. A method for fabricating a pole of a magnetic transducer having an air-bearing surface (ABS) location, the method comprising:

providing a leading shield layer, wherein the leading shield layer includes a leading shield surface between the ABS location and the depression, the leading shield surface being substantially perpendicular to the ABS location, and wherein the step of providing the intermediate layer further includes

depositing a refill material on the planarization stop layer and the leading shield layer, a portion of the refill material residing in the depression;

planarizing the magnetic transducer;

providing a flattening mill, the flatting mill removing a remaining portion of the planarization stop layer, a remaining portion of the refill material having a refill surface substantially coplanar with the leading shield surface; and

depositing an additional nonmagnetic layer, the additional nonmagnetic layer having the top surface;

providing a planarization stop layer on the leading shield layer;

removing a portion of the planarization stop layer distal from the ABS location to form an aperture therein and a portion of the leading shield layer distal from the ABS location to form a depression therein, the depression forming a bevel distal from the ABS location, the bevel being at an angle greater than zero degrees and less than ninety degrees from a direction perpendicular to the ABS location;

providing an intermediate layer having a top surface substantially perpendicular to the ABS location;

removing a portion of the intermediate layer to form a trench therein, the trench having a bottom corresponding to the leading shield and a location and a profile corresponding to the pole, wherein the step of removing at least a portion of the intermediate layer further includes:

removing an adjoining portion of the intermediate layer that adjoins the nonmagnetic layer and the capping layer; and

providing a side shield adjoining a portion of the nonmagnetic layer and the capping layer

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench;

providing the pole in the trench, the pole residing on the portion of the nonmagnetic layer and having a leading edge bevel corresponding to the bevel;

providing a capping layer covering the pole;

removing at least a portion of the intermediate layer; and

providing a wrap-around shield, the wrap-around shield being a conformal wrap-around shield;

providing at least one additional capping layer, the at least one additional capping layer residing on the side shield and the capping layer; and

forming a trailing edge bevel, a portion of the capping layer, a trailing edge portion of the pole, and a portion of the at least one additional capping layer proximate to the ABS location being removed during the forming of the trailing edge bevel, a remaining portion of the at least one additional capping layer and a remaining portion of the at least one additional capping layer residing distal from the ABS;

providing a top gap layer; and wherein the step of providing the wrap-around shield further includes

providing a top shield.

15. The method of claim 14 wherein the step of providing the top shield further includes:

removing a portion of the top gap layer and a portion of each of the remaining portion of the capping layer and the remaining portion of the additional capping layer distal from the ABS location;

providing a seed layer;

removing a first portion of the seed layer and a portion of the gap layer proximate to the ABS and distal from the pole location; and

providing a remaining portion of the top shield.

16. The method of claim 15 wherein the step of providing the top shield further includes:

removing a second portion of the seed layer distal from the ABS after the first portion is removed and before the remaining portion of the top shield is provided, thereby forming an aperture in the seed layer;

providing a nonmagnetic plug in the aperture extending through the seed layer before the remaining portion of the top shield is provided.

17. A method for fabricating a pole of a magnetic transducer having an air-bearing surface (ABS) location, the method comprising:

providing a leading shield layer, wherein the leading shield layer includes a leading shield surface between the ABS location and the depression, the leading shield surface being substantially perpendicular to the ABS location, and wherein the step of providing the intermediate layer further includes

depositing a refill material on the planarization stop layer and the leading shield layer, a portion of the refill material residing in the depression;

planarizing the magnetic transducer;

providing a flattening mill, the flatting mill removing a remaining portion of the planarization stop layer, a remaining portion of the refill material having a refill surface substantially coplanar with the leading shield surface; and

depositing an additional nonmagnetic layer, the additional nonmagnetic layer having the to surface;

providing a planarization stop layer on the leading shield layer;

removing a portion of the planarization stop layer distal from the ABS location to form an aperture therein and a portion of the leading shield layer distal from the ABS location to form a depression therein, the depression forming a bevel distal from the ABS location, the bevel being at an angle greater than zero degrees and less than ninety degrees from a direction perpendicular to the ABS location;

providing an intermediate layer having a top surface substantially perpendicular to the ABS location;

removing a portion of the intermediate layer to form a trench therein, the trench having a bottom corresponding to the leading shield and a location and a profile corresponding to the pole, the step of removing at least a portion of the intermediate layer further including

removing a non-adjoining portion of the intermediate layer, a remaining portion of the intermediate layer adjoining the nonmagnetic layer; and

providing a side shield;

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench, wherein the step of providing the nonmagnetic layer further includes:

providing a nonmagnetic bilayer layer including a Ta layer and a first Ru layer; and

providing a second Ru layer using a chemical vapor deposition (CVD);

providing the pole in the trench, the pole residing on the portion of the nonmagnetic layer and having a leading edge bevel corresponding to the bevel;

providing a capping layer covering the pole;

removing at least a portion of the intermediate layer; and

providing a wrap-around shield, the wrap-around shield being a non-conformal wrap-around shield.

18. A method for fabricating a pole of a magnetic transducer having an air-bearing surface (ABS) location, the method comprising:

providing a leading shield layer, wherein the leading shield layer includes a leading shield surface between the ABS location and the depression, the leading shield surface being substantially perpendicular to the ABS location, and wherein the step of providing the intermediate layer further includes

depositing a refill material on the planarization stop layer and the leading shield layer, a portion of the refill material residing in the depression;

planarizing the magnetic transducer;

providing a flattening mill, the flatting mill removing a remaining portion of the planarization stop layer, a remaining portion of the refill material having a refill surface substantially coplanar with the leading shield surface; and

depositing an additional nonmagnetic layer, the additional nonmagnetic layer having the to surface;

providing a planarization stop layer on the leading shield layer;

removing a portion of the planarization stop layer distal from the ABS location to form an aperture therein and a portion of the leading shield layer distal from the ABS location to form a depression therein, the depression forming a bevel distal from the ABS location, the bevel being at an angle greater than zero degrees and less than ninety degrees from a direction perpendicular to the ABS location;

providing an intermediate layer having a top surface substantially perpendicular to the ABS location;

removing a portion of the intermediate layer to form a trench therein, the trench having a bottom corresponding to the leading shield and a location and a profile corresponding to the pole, the step of removing at least a portion of the intermediate layer further including

removing a non-adjoining portion of the intermediate layer, a remaining portion of the intermediate layer adjoining the nonmagnetic layer; and

providing a side shield;

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench, wherein the step of providing the nonmagnetic layer further includes:

providing an alumina layer using atomic layer deposition;

providing the pole in the trench, the pole residing on the portion of the nonmagnetic layer and having a leading edge bevel corresponding to the bevel;

providing a capping layer covering the pole;

removing at least a portion of the intermediate layer; and

providing a wrap-around shield, the wrap-around shield being a non-conformal wrap-around shield.

19. A method for fabricating a pole of a magnetic transducer having an air-bearing surface (ABS) location, the method comprising:

providing a leading shield layer, wherein the leading shield layer includes a leading shield surface between the ABS location and the depression, the leading shield surface being substantially perpendicular to the ABS location, and wherein the step of providing the intermediate layer further includes

depositing a refill material on the planarization stop layer and the leading shield layer, a portion of the refill material residing in the depression;

planarizing the magnetic transducer;

providing a flattening mill, the flatting mill removing a remaining portion of the planarization stop layer, a remaining portion of the refill material having a refill surface substantially coplanar with the leading shield surface; and

depositing an additional nonmagnetic layer, the additional nonmagnetic layer having the to surface;

providing a planarization stop layer on the leading shield layer;

removing a portion of the planarization stop layer distal from the ABS location to form an aperture therein and a portion of the leading shield layer distal from the ABS location to form a depression therein, the depression forming a bevel distal from the ABS location, the bevel being at an angle greater than zero degrees and less than ninety degrees from a direction perpendicular to the ABS location;

providing an intermediate layer having a top surface substantially perpendicular to the ABS location, the step of removing at least a portion of the intermediate layer further including

removing a non-adjoining portion of the intermediate layer, a remaining portion of the intermediate layer adjoining the nonmagnetic layer; and

providing a side shield, wherein the step of providing the side shield further includes:

depositing at least one side shield material adjoining the portion of the nonmagnetic layer and the capping layer;

depositing an alumina fill layer on the at least one side shield material; and

planarizing the magnetic transducer;

removing a portion of the intermediate layer to form a trench therein, the trench having a bottom corresponding to the leading shield and a location and a profile corresponding to the pole;

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench,

providing the pole in the trench, the pole residing on the portion of the nonmagnetic layer and having a leading edge bevel corresponding to the bevel;

providing a capping layer covering the pole;

removing at least a portion of the intermediate layer; and

providing a wrap-around shield, the wrap-around shield being a non-conformal wrap-around shield.

20. A method for fabricating a pole of a magnetic transducer having an air-bearing surface (ABS) location, the method comprising:

providing a leading shield layer, wherein the leading shield layer includes a leading shield surface between the ABS location and the depression, the leading shield surface being substantially perpendicular to the ABS location, and wherein the step of providing the intermediate layer further includes

depositing a refill material on the planarization stop layer and the leading shield layer, a portion of the refill material residing in the depression;

planarizing the magnetic transducer;

providing a flattening mill, the flatting mill removing a remaining portion of the planarization stop layer, a remaining portion of the refill material having a refill surface substantially coplanar with the leading shield surface; and

depositing an additional nonmagnetic layer, the additional nonmagnetic layer having the to surface;

providing a planarization stop layer on the leading shield layer;

removing a portion of the planarization stop layer distal from the ABS location to form an aperture therein and a portion of the leading shield layer distal from the ABS location to form a depression therein, the depression forming a bevel distal from the ABS location, the bevel being at an angle greater than zero degrees and less than ninety degrees from a direction perpendicular to the ABS location;

providing an intermediate layer having a top surface substantially perpendicular to the ABS location;

removing a portion of the intermediate layer to form a trench therein, the trench having a bottom corresponding to the leading shield and a location and a profile corresponding to the pole, the step of removing at least a portion of the intermediate layer further includes

removing a non-adjoining portion of the intermediate layer, a remaining portion of the intermediate layer adjoining the nonmagnetic layer; and

providing a side shield

providing a nonmagnetic layer, at least a portion of the nonmagnetic layer residing in the trench;

providing the pole in the trench, the pole residing on the portion of the nonmagnetic layer and having a leading edge bevel corresponding to the bevel;

providing a capping layer covering the pole;

providing at least one additional capping layer, the at least one additional capping layer residing on the side shield and the capping layer;

forming a trailing edge bevel, a portion of the capping layer, a trailing edge portion of the pole, and a portion of the at least one additional capping layer proximate to the ABS location being removed during the forming of the trailing edge bevel, a remaining portion of the at least one additional capping layer and a remaining portion of the at least one additional capping layer residing distal from the ABS;

providing a top gap layer;

removing at least a portion of the intermediate layer;

providing a wrap-around shield, the wrap-around shield being a non-conformal wrap-around shield, the step of providing the wrap-around shield further including

providing a top shield.

21. The method of claim 20 wherein the step of providing the top shield further includes:

removing a portion of the top gap layer and a portion of each of the remaining portion of the capping layer and the remaining portion of the additional capping layer distal from the ABS location;

providing a seed layer;

removing a first portion of the seed layer and a portion of the gap layer proximate to the ABS and distal from the pole location; and

providing a remaining portion of the top shield.

22. The method of claim 21 wherein the step of providing the top shield further includes:

removing a second portion of the seed layer distal from the ABS after the first portion is removed and before the remaining portion of the top shield is provided, thereby forming an aperture in the seed layer;

providing a nonmagnetic plug in the aperture extending through the seed layer before the remaining portion of the top shield is provided.

Assignments (9)