Imprinting apparatus
View Patent ↗The present invention provides an imprinting apparatus in which stampers, after a transfer step, can be readily and quickly detached from a substrate and an atmosphere in the imprinting apparatus is kept clean. The imprinting device has an ejecting mechanism for separating a recording medium substrate from a first stamper and a second stamper the ejecting mechanism being formed including a sleeve and a coil spring that are movably provided in a movable die base with an exhausting duct, and also including a sleeve and a coil spring that are movably provided in a fixed die base with an exhausting duct.
1. An imprinting apparatus comprising:
a fixed die base including a fixed-side stamper holder having a stamper-holding portion for detachably holding an outer peripheral region of a first stamper that has a pattern of protrusions and recesses to be transferred onto a first surface of a recording medium substrate with a hollow disk shape, and a first pressing die on which the first stamper is mounted;
a movable die base movable to approach or separate from the fixed die base, the movable die base including a movable-side stamper holder having a stamper-holding portion for detachably holding an outer peripheral region of a second stamper that has a pattern of protrusions and recesses to be transferred onto a second surface of the recording medium, and a second pressing die that is disposed opposing the first pressing die and mounts, detachably through the second stamper, the recording medium substrate with an outer diameter smaller than that of the second stamper, the pattern of protrusions and recesses of the second stamper being transferred onto the recording medium substrate;
a first sleeve disposed movably in an inner circumferential surface of the first pressing die on the fixed die base and having an end plane that comes into contact with inner periphery of the first surface of the recording medium substrate;
a first enforcing means for enforcing an end plane of the first sleeve in a direction approaching the first surface of the recording medium substrate;
a second sleeve disposed movably in an inner circumferential surface of the second pressing die on the movable die base and having an end plane that comes into contact with inner periphery of the second surface of the recording medium substrate; and
a second enforcing means for enforcing an end plane of the second sleeve in a direction approaching the second surface of the recording medium substrate;
wherein, when the movable die base approaches the fixed die base, the end plane of the first sleeve comes in contact with inner periphery of the first surface of the recording medium substrate opposing to enforcement of the first enforcing means, and the end plane of the second sleeve comes in contact with inner periphery of the second surface of the recording medium substrate opposing to enforcement of the second enforcing means;
wherein when the movable die base separates from the fixed die base, accompanying the separating movement of the movable die base, the end plane of the first sleeve is moved to separate the recording medium substrate from the first stamper by enforcement of the first enforcing means, and the end plane of the second sleeve is moved to separate the recording medium substrate from the second stamper by enforcement of the second enforcing means;
wherein the first sleeve is provided with a collet pin, and the second sleeve is provided with a collet with which a tip portion of the collet pin selectively couples;
wherein when the movable die base approaches the fixed die base, a coupled condition is established between the tip portion of the collet pin and the collet to hold the recording medium substrate by a tab portion of the collet, the tab portion being allowed to elastically deform; and
wherein when the movable die base separates from the fixed die base, the tip portion of the collet pin and the collet are brought into an uncoupled condition to release the recording medium substrate from the tab portion;
the imprinting apparatus further comprising;
a first exhausting duct formed within the fixed die base and communicating to a sliding place at which the first enforcing means and an end portion of the first sleeve are disposed, communicates to an outer circumference of a first connection pin that connects the collet pin and the first sleeve; and
a second exhausting duct formed within the movable die base and communicating to a sliding place at which the second enforcing means and an end portion of the second sleeve are disposed, communicates to an inner hole of a second connection pin that connects the collet and the second sleeve.
2. The imprinting apparatus according to claim 1 , wherein a magnitude of enforcement of the first enforcing means is larger than a magnitude of enforcement of the second enforcing means.