Manufacturing and cleansing of thin film transistor panels
View Patent ↗A manufacturing a thin film transistor array panel includes depositing a first thin film including aluminum on a substrate, patterning the first thin film by photolithography and etching, cleansing the substrate including the first thin film, and depositing a second thin film on the cleansed substrate. The cleansing is performed using a cleansing material including ultrapure water, cyclic amine, pyrogallol, benzotriazole, and methyl glycol. The cleansing material includes ultrapure water at about 85 wt % to about 99 wt %, cyclic amine at about 0.01 wt % to about 1.0 wt %, pyrogallol at about 0.01 wt % to 1.0 wt %, benzotriazole at about 0.01 wt % to 1.0 wt %, and methyl glycol at about 0.01 wt % to 1.0 wt %.
1. A cleansing material for a thin film transistor array panel, comprising:
ultrapure water (H 2 O); cyclic amine compounds; pyrogallol; benzotriazole; and methyl glycol.
2. The cleansing material of claim 1 , containing about 85 wt % to about 99 wt % ultrapure water.
3. The cleansing material of claim 1 , containing about 0.01 wt % to about 1.0 wt % cyclic amine.
4. The cleansing material of claim 1 , containing about 0.01 wt % to 1.0 wt % pyrogallol.
5. The cleansing material of claim 1 , containing about 0.01 wt % to 1.0 wt % benzotriazole.
6. The cleansing material of claim 1 , containing about 0.01 wt % to 1.0 wt % methyl glycol.
7. The cleansing material of claim 1 , containing about 1.0 wt % cyclic amine, about 0.05 wt % pyrogallol, about 0.01 wt % benzotriazole, and about 0.1 wt % methyl glycol.
8. The cleansing material of claim 1 , containing pyrogallol and benzotriazole of about 2 wt % altogether.