Wafer scale optics
View Patent ↗A device can have an optical component having at least one alignment/attachment feature and a MEMS structure having a complimentary alignment/attachment feature for each alignment/attachment feature of the optical component. Each alignment/attachment feature of the optical component can mate with a corresponding alignment/attachment of the MEMS structure to align and/or attach the optical component to the MEMS structure. Thus, improved combinations of optical components and MEMS devices can be provided.
1. A device comprising:
a first lens having a contiguous portion that forms an alignment/attachment feature for the first lens;
a second lens having a contiguous portion that forms an alignment/attachment feature for the second lens;
a planar micro-electromechanical system (MEMS) structure disposed in a plane that is perpendicular to a common optical axis of the first and second lenses and having a complimentary alignment/attachment feature disposed perpendicular to the planar MEMS structure;
wherein the alignment/attachment features of the first and second lenses are each disposed perpendicular to the planar MEMS structure and each engages with the same alignment/attachment feature of the planar MEMS structure to align attach the first and second lenses to opposing sides of the planar MEMS structure;
wherein the planar MEMS structure comprises silicon, an alloy, a metal, or a plastic; and
wherein the alignment/attachment features of the first and second lenses each comprises a protrusion and the complimentary alignment/attachment feature of the planar MEMS structure comprises a cutout that is configured to receive the alignment/attachment features of the first and second lenses.
2. The device as recited in claim 1 , wherein the alignment/attachment feature of the first lens comprises a male alignment/attachment feature and the complimentary alignment/attachment feature of the planar MEMS structure comprises a female alignment/attachment feature.
3. A device comprising:
a plurality of lenses, each lens having a contiguous portion that forms at least one alignment/attachment feature for that lens;
a planar micro-electromechanical system (MEMS) structure having a complimentary alignment/attachment feature for each alignment/attachment feature of the plurality of lenses, wherein each complementary alignment/attachment feature of the planar MEMS structure is disposed perpendicular to the planar MEMS structure;
wherein the alignment/attachment features of the plurality of lenses are disposed perpendicular to the planar MEMS structure and engage with the complimentary alignment/attachment features of the planar MEMS structure to align and attach the plurality of lenses to the planar MEMS structure;
wherein the plurality of lenses comprises at least first and second lenses;
wherein the alignment/attachment features of the at least first and second lenses each engages with the same complimentary alignment/attachment feature of the planar MEMS structure to align and attach the at least first and second lenses to opposing sides of the planar MEMS structure;
wherein the planar MEMS structure is disposed in a plane that is perpendicular to a common optical axis of the at least first and second lenses;
wherein the planar MEMS structure comprises silicon, an alloy, a metal, or a plastic; and
wherein the alignment/attachment features of the at least first and second lenses each comprises a protrusion and at least one complimentary alignment/attachment feature of the planar MEMS structure comprises a cutout that is configured to receive the alignment/attachment features of the at least first and second lenses.
4. The device as recited in claim 3 , wherein the alignment/attachment features of at least an additional two of the plurality of lenses mate with different complimentary alignment/attachment features of the planar MEMS structure.
5. The device as recited in claim 3 , wherein the plurality of lenses mate with the same planar MEMS structure to define a lens array.
6. The device as recited in claim 3 , wherein at least one additional lens mates with the same planar MEMS structure.
7. The device as recited in claim 3 , wherein the planar MEMS structure comprises silicon.
8. A method for aligning/attaching one or more lenses to one another and/or to a structure, the method comprising:
attaching mating features of at least first and second lenses to complimentary mating features of a planar micro-electromechanical system (MEMS) structure,
wherein the mating features of the at least first and second lenses are formed from contiguous portions of the at least first and second lenses,
wherein the attaching comprises inserting the mating features of the at least first and second lenses into the complementary mating features of the planar MEMS structure by moving the at least first and second lenses toward opposing surfaces of the planar MEMS structure along a common optical axis of the at least first and second lenses;
wherein the planar MEMS structure is disposed in a plane that is perpendicular to the common optical axis of the at least first and second lenses and the complimentary mating features are disposed perpendicular to the planar MEMS structure,
wherein the mating features of the at least first and second lenses are each disposed perpendicular to the planar MEMS structure and each engages with the same complimentary features of the planar MEMS structure to align and attach the at least first and second lenses to opposing sides of the planar MEMS structure,
wherein the planar MEMS structure comprises silicon, an alloy, a metal, or a plastic; and
wherein the mating features of the at least first and second lenses each comprises a protrusion and at least one of the mating features of the planar MEMS structure comprises a cutout that is configured to receive the mating features of the at least first and second lenses.
9. A device comprising:
a plurality of lenses, each lens having a contiguous portion that forms at least one alignment/attachment feature;
a planar micro-electromechanical system (MEMS) structure having a complimentary alignment/attachment feature for each alignment/attachment feature of the plurality of lenses, wherein each complementary alignment/attachment feature of the planar MEMS structure is disposed perpendicular to the planar MEMS structure;
wherein the alignment/attachment features of at least first and second lenses of the plurality of lenses are each disposed perpendicular to the planar MEMS structure and each engages with the same complimentary alignment/attachment features of the planar MEMS structure to align and attach the at least first and second lenses to opposing sides of the planar MEMS structure;
wherein the planar MEMS structure is disposed in a plane that is perpendicular to a common optical axis of the at least first and second lenses;
wherein the planar MEMS structure comprises silicon, an alloy, a metal, or a plastic; and
wherein the alignment/attachment features of the at least first and second lenses each comprises a protrusion and the complimentary alignment/attachment feature of the planar MEMS structure comprises a cutout that is configured to receive the alignment/attachment features of the at least first and second lenses.
10. The device as recited in claim 9 , wherein the alignment/attachment features of at least an additional two of the lenses mate with different alignment/attachment features of the planar MEMS structure.
11. The device as recited in claim 9 , wherein the plurality of lenses mate with the same planar MEMS structure to define a lens array.
12. The device as recited in claim 9 , wherein at least one additional lens mates with the same planar MEMS structure.
13. The device as recited in claim 9 , wherein the planar MEMS structure comprises silicon.
14. The device as recited in claim 1 , wherein the alignment/attachment feature of the first lens extends outwardly from a periphery of the first lens and then further extends orthogonally with respect to the first lens.
15. The device as recited in claim 3 , wherein the alignment/attachment feature of each lens extends outwardly from a periphery of that lens and then further extends orthogonally with respect to that lens.
16. The method as recited in claim 8 , wherein the mating features of the at least first and second lenses extend outwardly from the at least first and second lenses and then further extends orthogonally with respect to the at least first and second lenses.
17. The device as recited in claim 9 , wherein the alignment/attachment feature of each lens extends outwardly from a periphery of that lens and then further extends orthogonally with respect to that lens.