Thin film encapsulation of MEMS devices
View Patent ↗A method of manufacturing a miniature electromechanical system (MEMS) device includes the steps of forming a moving member on a first substrate such that a first sacrificial layer is disposed between the moving member and the substrate, encapsulating the moving member, including the first sacrificial layer, with a second sacrificial layer, coating the encapsulating second sacrificial layer with a first film formed of a material that establishes an hermetic seal with the substrate, and removing the first and second sacrificial layers.
1. A micro-electromechanical system (MEMS) device comprising:
a first substrate having a top planar surface;
a first control circuit formed on the top surface of said first substrate and including a first actuation element;
a movable member formed on said first substrate in spaced relation to said first actuation element, said movable member being electrically conductive and movable in the direction of said first actuation element; and
a helmet defining a hermetically sealed chamber around said movable member, said helmet being formed by removing a sacrificial layer between said movable member and said helmet.
2. The MEMS device of claim 1 , and further comprising an inert gas disposed within said hermetically sealed chamber.
3. The MEMS device of claim 1 , and further comprising a second control circuit with an actuator element disposed within said helmet.
4. The MEMS device of claim 1 , and further comprising a plurality of moving members formed on said substrate, wherein said helmet defines a plurality of hermetically sealed chambers around said movable members.
5. The MEMS device of claim 1 , wherein said helmet is formed of a silicon oxynitride film.