Condenser microphone
View Patent ↗A condenser microphone is disclosed. The condenser microphone includes a substrate having a cavity, a backplate connected to the substrate, a diaphragm facing to the backplate, and an anchor supporting the diaphragm. A first gap is formed between the diaphragm and the backplate. A groove is arranged on the anchor and the diaphragm partially covers the groove. The diaphragm and the groove forms a second gap communicating with the first gap.
1. A condenser microphone comprising:
a substrate having a through cavity;
a backplate connected to the substrate and having a plurality of sound holes;
a diaphragm opposed to the backplate for forming a capacitor;
a first gap formed between the diaphragm and the backplate;
the diaphragm having a vibrating member and a supporting member extending from the periphery of the vibrating member;
an anchor supporting the diaphragm and isolating the diaphragm from the backplate, the anchor having a cavity in a middle portion and at least one groove, the cavity having an inner wall and the groove being arranged in the inner wall, the groove partially covered by the supporting member of the diaphragm for forming a second gap communicating with the first gap.
2. The condenser microphone as described in claim 1 , wherein the supporting member includes a first length along a radial direction of the diaphragm and the groove defines a second length along a radial direction of the cavity, the first length being greater than the second length.
3. The condenser microphone as described in claim 1 , wherein the supporting member includes a first part extending along a radial direction of the diaphragm and a second part perpendicular to the first part with a middle portion connected with the first part, the second part strides over the groove.