Monolithic integrated composite group III-V and group IV semiconductor device and method for fabricating same
View Patent ↗According to one disclosed embodiment, a method for fabricating a monolithic integrated composite device comprises forming a group III-V semiconductor body over a group IV semiconductor substrate, forming a trench in the group III-V semiconductor body, and forming a group IV semiconductor body in the trench. The method also comprises fabricating at least one group IV semiconductor device in the group IV semiconductor body, and fabricating at least one group III-V semiconductor device in the group III-V semiconductor body. In one embodiment, the method further comprises planarizing an upper surface of the III-V semiconductor body and an upper surface of the group IV semiconductor body to render those respective upper surfaces substantially coplanar. In one embodiment, the method further comprises fabricating at least one passive device in a defective region of said group IV semiconductor body adjacent to a sidewall of the trench.
1. A monolithic integrated composite device comprising:
a group IV semiconductor substrate supporting an overlying group III-V semiconductor body;
a trench formed in said group III-V semiconductor body;
a first buried layer having a first conductivity type formed in said trench over said group IV semiconductor substrate;
a second buried layer having a second conductivity type opposite said first conductivity type formed over said first buried layer in said trench; and
a group IV semiconductor body formed in said trench over said second buried layer, said group IV semiconductor body including a defective region adjacent a sidewall of said trench;
wherein said first buried layer and said second buried layer provide electrical isolation for semiconductor devices in said group IV semiconductor body.
2. The monolithic integrated composite device of claim 1 , wherein said group IV semiconductor body comprises an epitaxial body grown in said trench.
3. The monolithic integrated composite device of claim 1 , wherein said group IV semiconductor body comprises silicon.
4. The monolithic integrated composite device of claim 1 , wherein said group III-V semiconductor body comprises a plurality of III-nitride semiconductor layers.
5. The monolithic integrated composite device of claim 1 , wherein said group III-V semiconductor body comprises a heterojunction formed at an interface of a gallium nitride (GaN) layer and an aluminum gallium nitride (AlGaN) layer.
6. The monolithic integrated composite device of claim 1 , further comprising:
at least one group IV semiconductor device fabricated in said group IV semiconductor body; and
at least one group III-V semiconductor device fabricated in said group III-V semiconductor body.